公开(公告)号：US3506585A

公开(公告)日：1970-04-14

申请号：US60481666

申请日：1966-12-27

Applicant: MATSUSHITA ELECTRONICS CORP

Inventor： OTSUKA SHIGERU ,  OKABAYASHI YOICHI

IPC: B01D37/00 ,  C01F17/00 ,  C09K11/01 ,  C09K11/78 ,  C09K1/04

CPC classification number: B01D37/00 ,  C01F17/0043 ,  C09K11/01 ,  Y02W30/72

公开(公告)号：CA828678A

公开(公告)日：1969-12-02

申请号：CA828678D

Applicant: MATSUSHITA ELECTRONICS CORP

Inventor： OTSUKA SHIGERU ,  OKABAYASHI YOICHI

公开(公告)号：JPH02154424A

公开(公告)日：1990-06-13

申请号：JP30803488

申请日：1988-12-06

Applicant: MATSUSHITA ELECTRONICS CORP

Inventor： TAKEDA HIRONORI ,  UCHIYAMA KATSUMI ,  KOJIMA MASAMITSU ,  OTSUKA SHIGERU

IPC: B08B3/10 ,  H01L21/304

Abstract: PURPOSE:To form a water flow from a lower layer to an upper layer and facilitate secure discharge of contaminants having a large specific gravity by a method wherein a nozzle is provided near the bottom of a washing vessel and pure water is spouted out along the direction approximately in parallel with the pure water surface of the washing vessel. CONSTITUTION:The spouting outlet of a nozzle 4 for spouting out pure water is provided near the bottom of a washing vessel 1 and in parallel with the water surface of the vessel 1. Pure water spouted out by the nozzle is made to flow from the lower layer to upper layer of the vessel 1 diagonally and overflows the edge of the washing vessel 1 to be discharged. Therefore, if contaminants having a large specific gravity stay on the bottom of the washing chamber, they are whirled up by a water flow in parallel with the bottom and brought up to the surface of the washing vessel 1 and discharged. With this constitution, water staying in the washing vessel is always replaced and the contaminants in the washing vessel can be efficiently discharged, so that high washing capability can be maintained.