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1.COMPLEX MICRODEVICES AND APPPARATUS AND METHODS FOR FABRICATING SUCH DEVICES 审中-公开
Title translation: 复杂的微型装置和装置以及用于制造这种装置的方法公开(公告)号:WO03050852A2
公开(公告)日:2003-06-19
申请号:PCT/US0239146
申请日:2002-12-06
Applicant: MEMGEN CORP , BANG CHRISTOPHER A , COHEN ADAM L , LOCKARD MICHAEL S , EVANS JOHN D
Inventor: BANG CHRISTOPHER A , COHEN ADAM L , LOCKARD MICHAEL S , EVANS JOHN D
CPC classification number: H01P11/005 , B81B7/02 , B81B2201/042 , G01P15/0802 , G01P15/125 , H01P3/06 , H01P5/183 , H01P11/00
Abstract: Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB TM )
Abstract translation: 本发明的各种实施例涉及包括传感器,致动器,阀,扫描反射镜,加速度计,开关等的各种微型装置。 在一些实施例中,通过电化学制造(EFAB TM TM)形成器件,
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公开(公告)号:AU2002360464A8
公开(公告)日:2003-06-17
申请号:AU2002360464
申请日:2002-12-03
Applicant: MEMGEN CORP
Inventor: COHEN ADAM L , SMALLEY DENNIS R , EVANS JOHN D , BANG CHRISTOPHER A , LOCKARD MICHAEL S , GROSSER MORTON , BROWN ELLIOTT R
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公开(公告)号:AU2002360464A1
公开(公告)日:2003-06-17
申请号:AU2002360464
申请日:2002-12-03
Applicant: MEMGEN CORP
Inventor: BANG CHRISTOPHER A , COHEN ADAM L , LOCKARD MICHAEL S , SMALLEY DENNIS R , GROSSER MORTON , BROWN ELLIOTT R , EVANS JOHN D
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公开(公告)号:AU2002351289A1
公开(公告)日:2003-06-23
申请号:AU2002351289
申请日:2002-12-06
Applicant: MEMGEN CORP
Inventor: EVANS JOHN D , BANG CHRISTOPHER A , COHEN ADAM L , LOCKARD MICHAEL S
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公开(公告)号:AU2003280468A1
公开(公告)日:2004-01-19
申请号:AU2003280468
申请日:2003-06-27
Applicant: MEMGEN CORP
Inventor: LOCKARD MICHAEL S , SMALLEY DENNIS R , GROSSER MORTON , BROWN ELLIOTT R , EVANS JOHN D , BANG CHRISTOPHER A , COHEN ADAM L
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