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公开(公告)号:BR9901357A
公开(公告)日:2001-03-20
申请号:BR9901357
申请日:1999-04-28
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , SHAO HONG , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRICK MICHELLE
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01C17/14 , C23C16/00
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:IL156217A
公开(公告)日:2004-12-15
申请号:IL15621799
申请日:1999-04-18
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , HONG SHAO , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRIK MICHELLE
IPC: C23C20060101 , C23C16/40 , H01L1/20
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公开(公告)号:IL129493A
公开(公告)日:2004-12-15
申请号:IL12949399
申请日:1999-04-18
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , HONG SHAO , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRICK MICHELLE
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01L1/102
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:CA2267492C
公开(公告)日:2003-09-23
申请号:CA2267492
申请日:1999-03-29
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: LIN WEN-YI , SHOUP SHARA S , THOMAS JOE , HENDRICK MICHELLE , HUNT ANDREW T , HWANG TZYY JIUAN , SHAO HONG , LUTEN HENRY A , BOTTOMLEY STEPHEN E , CARPENTER RICHARD W , MCENTYRE JOHN ERIC
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01C17/075
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:AU5783600A
公开(公告)日:2001-01-22
申请号:AU5783600
申请日:2000-06-29
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW TYE , MCENTYRE JOHN ERIC , NEUMAN GEORGE ANDREW , VINSON MATTHEW SCOTT
IPC: C03B29/08 , C03C17/00 , C03C17/245 , C23C16/453 , C23C16/46 , C23C16/54 , H05K3/12 , H05K3/14 , C23C16/513
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公开(公告)号:WO0102622A3
公开(公告)日:2001-05-25
申请号:PCT/US0018163
申请日:2000-06-29
Applicant: MICROCOATING TECHNOLOGIES INC , HUNT ANDREW TYE , MCENTYRE JOHN ERIC , NEUMAN GEORGE ANDREW , VINSON MATTHEW SCOTT
Inventor: HUNT ANDREW TYE , MCENTYRE JOHN ERIC , NEUMAN GEORGE ANDREW , VINSON MATTHEW SCOTT
IPC: C03B29/08 , C03C17/00 , C03C17/245 , C23C16/453 , C23C16/46 , C23C16/54 , H05K3/12 , H05K3/14 , C23C16/513
CPC classification number: C03B29/08 , C03C17/002 , C03C17/245 , C03C17/2453 , C03C2217/211 , C03C2217/216 , C03C2217/228 , C03C2217/231 , C03C2217/241 , C03C2218/152 , C23C16/453 , C23C16/46 , C23C16/54 , H05K3/12 , H05K3/146
Abstract: Methods for producing coatings on a glass substrate using combined chemical vapor deposition or other heat concentrated deposition (CHD) techniques. The term "glass" in this context is defined as those materials that crack, break or are otherwise damaged prior to plastic deformation of the material. In combustion chemical vapor deposition CCVD, a reagent and a carrier solution are mixed together to form a reagent mixture. The reagent mixture is then ignited to create a flame (14, 16), or alternatively, the reagent mixture may be fed to a plasma torch or other heat source. The combustion source may vaporize at least part of the reagent, the vapor phase of the reagent contacting the surface of the substrate (A) to be coated. In this manner, a film or coating is formed on the glass substrate (A). In some of the disclosed methods, the glass substrate (A) may be preheated, to avoid differential heating of the glass by the combustion source. Various methods of reducing the differential heating are disclosed. This differential heating may cause thermal shock or breakage of the glass substrate (A).
Abstract translation: 使用组合化学气相沉积或其他热浓缩沉积(CHD)技术在玻璃基板上生产涂层的方法。 在本文中术语“玻璃”被定义为在材料的塑性变形之前破裂,断裂或以其他方式损坏的材料。 在燃烧化学气相沉积CCVD中,将试剂和载体溶液混合在一起以形成试剂混合物。 然后将试剂混合物点燃以产生火焰(14,16),或者可将试剂混合物送入等离子体焰炬或其它热源。 燃烧源可以蒸发至少部分试剂,试剂的气相与待涂覆的基材(A)的表面接触。 以这种方式,在玻璃基板(A)上形成膜或涂层。 在所公开的一些方法中,玻璃基板(A)可以被预热,以避免燃烧源对玻璃的不同的加热。 公开了减少差动加热的各种方法。 该差分加热可能导致玻璃基板(A)的热冲击或断裂。
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