公开(公告)号：WO2015053605A1

公开(公告)日：2015-04-16

申请号：PCT/MY2014/000139

申请日：2014-05-30

Applicant: MIMOS BERHAD

Inventor： MAZLIN, Man ,  MOHAMMAD FAIRUZ, Amir ,  MUHAMAD RAMDZAN, Buyong ,  ZALIHA, Mohamad ,  AZLINA, Mohd Zain

IPC: H01L21/02 ,  C23G1/24

CPC classification number: C23G1/24

Abstract: The present invention relates to a method for eliminating aluminium surface defectson large exposed metalcomprising: conducting a post pad etching treatment (100) on the metal; cold-rinsing the metal (200); and drying the metal (300) using nitrogen;characterized in that the steps of conducting a post pad etching treatment (100) on the metal, cold-rinsing the metal (200); and drying the metal (300) using nitrogen involve chemical-free solvent. The present invention is advantageous as it is effective in eliminating the white haze effect. The advantage of use of de-ionized (DI) water only cleaning method is that it is more environment-friendly.

Abstract translation: 本发明涉及一种消除铝表面缺陷大暴露金属的方法：在金属上进行后焊盘蚀刻处理（100）; 冷冲洗金属（200）; 并使用氮气干燥金属（300）;其特征在于，在所述金属上进行焊盘蚀刻处理（100），冷冲洗所述金属（200）的步骤; 并用氮气干燥金属（300）包括无化学溶剂。 本发明是有利的，因为它有效地消除白霾效应。 使用去离子（DI）水的清洗方法的优点是更环保。