公开(公告)号：MY158780A

公开(公告)日：2016-11-15

申请号：MYPI2013701092

申请日：2013-06-25

Applicant: MIMOS BERHAD

Inventor： DANIEL BIEN CHIA SHENG ,  LEE HING WAH ,  MOHSEN NABIPOOR ,  KHAIRUL ANUAR BIN ABDUL WAHID ,  SAAT SHUKRI BIN EMBONG

IPC: G01N27/07 ,  G01N27/22 ,  G01N27/30 ,  H01L21/027 ,  H01L29/786

Abstract: DESCRIBED HEREIN IS A METAL ELECTRODE (100) HAVING AT LEAST ONE HIGH ASPECT RATIO STRUCTURE. THE METAL ELECTRODE (100) COMPRISES A SILICON LAYER (101) HAVING THE HIGH ASPECT RATIO STRUCTURE, AN OXIDE LAYER (102) ON TOP OF THE SILICON LAYER (101), AN ADHESIVE LAYER (103) ON TOP OF THE OXIDE LAYER (102), AND A METAL LAYER (104) ON TOP OF THE ADHESIVE LAYER (103). THE THICKNESS OF THE METAL LAYER (104) IS AT LEAST 15 TIMES LESSER THAN THE HEIGHT OF THE HIGH ASPECT RATIO STRUCTURE. DUE TO THIS PARTICULAR FEATURE, THE METAL LAYER (104) IS DEPOSITED ON TOP OF THE ADHESIVE LAYER (103) IN A SELF-ALIGNED MANNER, TAKING THE SHAPE OF THE HIGH ASPECT RATIO STRUCTURE, AND DISCONNECTED AT THE WALL OF THE HIGH ASPECT RATIO STRUCTURE. FURTHER, THE METAL ELECTRODE (100) CAN BE MODIFIED ACCORDINGLY TO SUIT DIFFERENT APPLICATIONS. ALSO DESCRIBED HEREIN IS A METHOD FOR FABRICATING THE AFOREMENTIONED METAL ELECTRODE (100). BEST ILLUSTRATIVE

公开(公告)号：MY171435A

公开(公告)日：2019-10-14

申请号：MYPI2014701545

申请日：2014-06-11

Applicant: MIMOS BERHAD

Inventor： DANIEL BIEN CHIA SHENG ,  LEE HING WAH ,  SAAT SHUKRI BIN EMBONG

IPC: G01L1/18

Abstract: A pressure-sensing device (10) and a process for fabricating it is disclosed. In a preferred embodiment, a sacrificial oxide layer (11) is first formed onto a silicon substrate (30). A bottom polymer film (14) is then formed on oxide layer (11). Conductive elements including electrodes (12a, 12b) and/or contact pads (18a, 18b) are formed on the bottom polymer film (14). A graphene sheet (20) is deposited to electrically connect the electrodes (12a, 12b). A top polymer film (16) is then laid on top so that the conductive elements (12, 18) and graphene (20) are sandwiched and encapsulated in between the top and bottom polymer layers (14, 16) chosen from polyimide or poly dimethylsiloxane (PDMS). Openings (19a, 19b) on top polymer layer (16) may optionally be provided to allow for interconnection of the contact pads (18a, 18b). The sacrificial oxide (11) is then etched to release the completed device (10) from the substrate (30) may be reused.

公开(公告)号：MY163549A

公开(公告)日：2017-09-29

申请号：MYPI2012005325

申请日：2012-12-10

Applicant: MIMOS BERHAD

Inventor： MOHD RAIS BIN AHMAD ,  SAGIR ALVA ,  SAAT SHUKRI BIN EMBONG

IPC: G01N27/333 ,  G01N27/403 ,  G01N33/18

Abstract: THE PRESENT INVENTION RELATES TO AN AQUATIC POLLUTANT SENSOR COMPRISING: A TRANSDUCER (101) AS SENSING ELECTRODE TO CONVERT ANALYTE CONCENTRATIONS TO VOLTAGE SIGNALS; AN ION SELECTIVE LAYER (103) DEPOSITED ON THE TRANSDUCER (101) TO SELECTIVELY TRANSPORT TARGET ANALYTE TO THE SAID TRANSDUCER (101); POTENTIOMETRY READOUT CIRCUIT (105) TO MEASURE POTENTIAL DIFFERENCE BETWEEN CHEMICAL SENSOR AND REFERENCE ELECTRODE; AN INERT SENSOR TIP SUBSTRATE (107) HAVING AT LEAST ONE SENSOR OPENING, AT LEAST ONE REFERENCE ELECTRODE OPENING AND AT LEAST TWO TRACKS FOR WIRE TRACES; A PROTECTOR (109) TO PROVIDE MECHANICAL STRENGTH, REDUCE FOULING AND ALLOW CLEANING; AND A REFERENCE ELECTRODE (111); CHARACTERIZED IN THAT THE TRANSDUCER (101) FURTHER COMPRISING AN ELECTROCHEMICAL TRANSDUCER NANOCOMPOSITE; THE REFERENCE ELECTRODE (111) IS IN THE FORM OF SOLID; AND THE PROTECTOR (109) FURTHER COMPRISING AN INERT POROUS PROTECTIVE ENCAPSULATION: MOST ILLUSTRATIVE