公开(公告)号：CA2154600A1

公开(公告)日：1996-02-12

申请号：CA2154600

申请日：1995-07-25

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU ,  NAKAGAWA HIROAKI

IPC: G03F1/64 ,  H01L21/027

Abstract: An opening end face of a frame is closed by a transparent thin film, a vent is formed in the frame, and a filter having a filtration area larger than the sectional area of the vent is mounted to the frame to cover the vent. The filtration area of the filter an effective area where allows the passage of gas in the filter. Then, the filter is mounted to the frame so that there is a certain space between the frame and the filter. In the convent,ional device, since the filter is directly mounted to the frame without space between the filter and the frame, the filtration area of the filter is substantially the same as the sectional area of the vent. In case of mounting the filter apart from the frame, however, the filtration area of the filter can be lager than the sectional area of the vent so that the quantity of gas flow is greater than that of the conventional one. Therefore, its adaptability to the changes in atmospheric pressure and in temperature is also improved.

公开(公告)号：JPH1048811A

公开(公告)日：1998-02-20

申请号：JP20750396

申请日：1996-08-07

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU ,  KONDO MASAHIRO

IPC: G03F1/64 ,  H01L21/027 ,  G03F1/14

Abstract: PROBLEM TO BE SOLVED: To easily grasp a pellicle frame or a mask protecting device from a distant place and to prevent contamination by providing a frame with handles so that the frame can be caught by mechanical hands. SOLUTION: The both sides of a pellicle frame 5 are provided with wide handles 6. The handles are required to have only a function to be caught by mechanical hands, and therefore, such accuracy as required for processing or production of insertion holes or fine grooves on a pellicle frame 5 is not required for the handle. Otherwise, accurate control of tools to engage insertion holes or fine grooves is not required. The pellicle frame 5 can be grasp and held on both sides or one side. The only function required for the handle is that the handle can be grasp from one side, and therefore, the structure is simple and the automatic production line can be made more compact. By supporting the pellicle frame with engaged handles on the mount placed at a specified distance on a conveyer, the pellicle frame 5 or a mask protecting device can be carried in a noncontact state from the conveyer so that contamination by the belt can be prevented.

公开(公告)号：JPH09325471A

公开(公告)日：1997-12-16

申请号：JP14315796

申请日：1996-06-05

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU ,  OHARA YUTAKA

IPC: G03F1/62 ,  H01L21/027 ,  G03F1/14

Abstract: PROBLEM TO BE SOLVED: To provide a pericule storage case which can be operated easily, securely, and speedily and excels in seal open operation property without giving any effect such as damage to a pericule in take-out operation of pericule from the storage case, in particular, in take-out operation by an automatic seal opening device. SOLUTION: This case consists of a case main body having an inner bottom face on which a pericule in which a pericule film is stretched and provided on a frame is positioned and put and an upper lid having a projection part 2 like a reverse plate formed in such a manner that the pericule can be fixed and stored in the inside thereof. At least one cut-in part for vacuum break which is used when the case is opened is provided on the upper lid, one end of the cut-in part is positioned in adjacent to a rise profile of the projection part 2 like the reverse plate, and the other end connected to it is positioned on an inner side from an outer peripheral fringe 1 of the upper lid by the width of 1mm or more and less than 80mm (excepting a region on the inner side of the rise part profile).

公开(公告)号：JPH05158224A

公开(公告)日：1993-06-25

申请号：JP32300291

申请日：1991-12-06

Applicant: MITSUI PETROCHEMICAL IND ,  KEMITETSUKU KK

Inventor： FUJITA MINORU ,  NAKAGAWA HIROAKI ,  SAITO TSUTOMU

IPC: C09J11/06 ,  C09J133/04 ,  C09J133/06 ,  C09J201/00 ,  G03F1/62 ,  H01L23/10

Abstract: PURPOSE:To provide the pellicle structural body which has a coating material layer on the surface to be at least the inside surface of a pellicle film, has the sufficient strength of adhesion between the pellicle film and a frame body and prevents the peeling of both even if air blow, etc., are executed for the purpose of removing the foreign matter of the pellicle film surface. CONSTITUTION:The pellicle structural body 10 consists of the frame body 14 which has an aperture vertically penetrating the structural body, the pellicle 12 which is extended at the top end of the aperture of the frame body 14 and has the coating material layer on at least the inside surface and an adhesive part 20 where the end edge of the frame body 14 and the peripheral edge of the pellicle film are adhered via an adhesive layer. The coating materials 16, 18 in the adhesive part 20 are dissolved and decomposed in the adhesive 20 and the base body of the pellicle film and the adhesive 20 are directly touched and adhered.

公开(公告)号：JPH095983A

公开(公告)日：1997-01-10

申请号：JP14929295

申请日：1995-06-16

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU ,  KAYA TOSHIO

IPC: G03F1/64 ,  G03F1/14

Abstract: PURPOSE: To provide a pellicle frame having no possibility of dust generation by applying a coating material or tacky adhesive on the inside flanks of a frame, then applying a surface coating material on the mask adhesive side end face and further applying an adhesive on it. CONSTITUTION: This pellicle frame 15 is constituted by having the coating layer of the coating material or the tacky adhesive on the inner flanks of the frame and providing the end face on the mask adhesive side with the coating layer of the surface coating material and further, the surface with the adhesive layer. The process for producing the pellicle frame is executed by applying the coating material or the tacky adhesive on the inner flanks of the frame, then applying the surface coating material on the mask adhesive side end face, and applying the adhesive. The surface coating material applied on the end face on the lower side of the frame diffuses to the end face on the lower side before the material arrives at the protective film 17 of the tacky adhesive applied on the inner flanks of the frame, thereby forming the coating layer 16 and eliminating the exposed parts of the aluminum frame. Then, the dust generation from the pellicle frame 15 is prevented.

公开(公告)号：JPH06186732A

公开(公告)日：1994-07-08

申请号：JP34284092

申请日：1992-12-22

Applicant: MITSUI PETROCHEMICAL IND

Inventor： MATSUOKA HIDETO ,  FUKUOKA ONORI ,  KISO YOSHIHISA ,  FUJITA MINORU

IPC: B32B27/30 ,  C09J7/02 ,  C09J133/04 ,  C09J133/14 ,  G03F1/62 ,  H01L21/027 ,  G03F1/14

Abstract: PURPOSE:To provide an adhesive pellicle film excellent in adhesiveness and light transmissivity and having excellent light resistance even to light having such short wavelength as 360-450nm. CONSTITUTION:An adhesive material layer made of fluorine-contg. poly-(meth) acrylate is formed on one side of a transparent thin film of fatty acid ester of cellulose. The poly(meth)acrylate is a copolymer of 20-80mol% monomer (A) represented by a formula CH2=C(R )-COOR (where R is H or methyl and R is straight chain fluoroalkyl) with 80-20mol% monomer (B) represented by a formula CH2=C(R )-COOR (where R is H or methyl and R is branched fluoroalkyl) and has 0.10-0.35dl/g intrinsic viscosity (eta) measured in m-xylene hexafluoride at 60 deg.C. The objective adhesive pellicle film for exposure with light having such short wavelength as 360-450nm is obtd.

公开(公告)号：JPH04199055A

公开(公告)日：1992-07-20

申请号：JP33149990

申请日：1990-11-29

Applicant: MITSUI PETROCHEMICAL IND ,  KEMITETSUKU KK

Inventor： FUJITA MINORU ,  NAKAGAWA HIROAKI ,  SAITO TSUTOMU

IPC: G03F1/62 ,  H01L21/027

Abstract: PURPOSE:To prevent the separation between a pellicle film and a frame body by bonding the pellicle film to the frame body using adhesive capable of dissolving coating layers. CONSTITUTION:A pellicle structure body 10 is formed by bonding a pellicle film 12 to a frame body 14 using adhesive 20 capable of dissolving a coating layer. After forming coating layers 16, 18 on the whole surface of the pellicle film 12, the coating layers 16, 18 are dissolved/removed by the adhesive 20 at the time of bonding the pellicle film 12 to the frame body 14, and the adhesive 20 is hardened to bond the pellicle film 12 directly to the frame body 14. Sufficient bonding strength can be thereby obtained, and both are not separated even with air blowing or the like performed to remove foreign material from the pellicle film face.

公开(公告)号：JPH03259258A

公开(公告)日：1991-11-19

申请号：JP5929990

申请日：1990-03-09

Applicant: MITSUI PETROCHEMICAL IND

Inventor： MATSUOKA HIDETO ,  FUJITA MINORU ,  TANAKA MASAHIDE ,  MATSUMOTO MUNEYUKI ,  NIDAWARA MASATOSHI

IPC: G03F1/62 ,  H01L21/027

Abstract: PURPOSE:To make improvement in tacky adhesiveness and ray transmittance by using a fluorine-contained poly(meth)acrylate having a specific compsn. and specific ultimate viscosity as a tacky adhesive material. CONSTITUTION:The pellicle 1 consisting of the pellicle film 3 and a pellicle frame 2 is constituted of a copolymer of a monomer [A] selected from a group consisting of formula I and a monomer [B] selected from a group consisting of formula II. The tacky adhesive material layer 5 consisting of the fluorine- contained poly(meth)acrylate having 45 to 75mol% content ratio of the monomer [A] and 55 to 25mol% content ratio of the monomer [B] and 0.07 to 0.2dl/g ultimate viscosity [eta] measured in methaxylene fluoride of 60 deg.C is formed on one surface of a transparent thin film 4, by which the tacky adhesive pellicle film 3 is formed. In the formulas I, II, R , R denote an H atom or methyl group; R denotes a straight chain fluoroalkyl group without contg. ether oxygen; R denotes a straight chain fluoroalkyl group contg. ether oxygen or branched fluoroalkyl group which may contain the ether oxygen. The improved tacky adhesiveness and ray transmittance are obtd. in this way.

公开(公告)号：JPH1048812A

公开(公告)日：1998-02-20

申请号：JP20750496

申请日：1996-08-07

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU

IPC: G03F1/64 ,  H01L21/027 ,  G03F1/14

Abstract: PROBLEM TO BE SOLVED: To prevent production of dust caused by the contact of a pellicle with a case while the pellicle housed in a housing case moves during transportation, to prevent deformation of an adhesive applied on a pellicle frame to adhere a mask due to distortion of the base plate of the case, and to prevent production of dust by air passing through the frame. SOLUTION: Planer handles 2 are formed projectingly on both sides of a frame of the pellicle 1. Step-like receiving base 6 are fixed facing each other on both sides of the base plate 5, and stoppers 8 are formed downward on both sides of the lid 7. After the handles 2 on both sides of the pellicle 1 are engaged with the step-like mounts 6 and the lid is closed, the steps of the receiving base 6 and stoppers 8 of the lid 7 clamp the handles 2 to fix the pellicle, while the adhesive 9 is not in contact with the base plate 5.

公开(公告)号：JPH08106156A

公开(公告)日：1996-04-23

申请号：JP14797495

申请日：1995-06-15

Applicant: MITSUI PETROCHEMICAL IND

Inventor： FUJITA MINORU ,  NAKAGAWA HIROAKI

IPC: G03F1/64 ,  H01L21/027 ,  G03F1/14

Abstract: PURPOSE: To enhance responsiveness with respect to the change of temperature or pressure as for a mask protection device constituted so that permeability is given in a state where it is fitted to a mask by forming an air hole on a frame and a thin film is prevented from being swollen or dented because of the change of the temperature or the pressure. CONSTITUTION: A filter 2 covering the air hole 1 is stuck to the outside of the frame by a ring-like double coated adhesive tape surrounding the hole 1 and provided by being separated from the frame. When the area of an effective part where the gas of the filter flows is defined as A and the area of the hole 1 is defined (a), the moving coefficient (k) of the gas at the hole 1 becomes A/a in comparison with a case that the filter 2 is directly fitted to the frame.