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公开(公告)号：WO03008085A2
公开(公告)日：2003-01-30
申请号：PCT/US0222599
申请日：2002-07-16
Applicant: MKS INSTR INC
Inventor： GU YOUFAN , DOZORETZ PAUL , MUELLER JAMES , GOSS BENJAMIN , NEUMEISTER DAVID
CPC classification number: B01D1/0082
Abstract: The present invention provides a vapor delivery system and a method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
Abstract translation: 本发明提供了一种蒸气输送系统和一种根据需要有效产生水蒸气的方法。 更具体地说，本发明通过在蒸发器室内的压力降低时在蒸发器室内保持足够温度的足够体积的水来产生低温水蒸气而不形成冰。
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公开(公告)号：DE10297050T5
公开(公告)日：2004-07-08
申请号：DE10297050
申请日：2002-07-16
Applicant: MKS INSTR INC
Inventor： GU YOUFAN , DOZORETZ PAUL , MUELLER JAMES , GOSS BENJAMIN , NEUMEISTER DAVID
Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
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公开(公告)号：AU2002354927A1
公开(公告)日：2003-03-03
申请号：AU2002354927
申请日：2002-07-16
Applicant: MKS INSTR INC
Inventor： MUELLER JAMES , GU YOUFAN , NEUMEISTER DAVID , DOZORETZ PAUL , GOSS BENJAMIN
Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
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