公开(公告)号：US6361607B2

公开(公告)日：2002-03-26

申请号：US78210501

申请日：2001-02-12

Applicant: MKS INSTR INC

Inventor： DOZORETZ PAUL ,  GU YOUFAN

IPC: B01D5/00 ,  C23C16/44 ,  H01L21/31 ,  C23C16/00 ,  B01D24/00 ,  H01L21/00

CPC classification number: H01J37/32844 ,  B01D5/0036 ,  C23C16/4412 ,  Y02C20/30 ,  Y10S438/905

Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

Abstract translation: 用于在真空泵管线中控制来自反应炉流出物的TEOS聚合的TEOS捕集器，SiO 2 CVD工艺包括分子种类选择性流阻碍介质，其吸附并保留来自流出物的TEOS和水分子足够长以消耗基本上所有的水分子 TEOS水解反应，同时允许非水解的TEOS，乙烯和其他气态副产物通过捕集阱并保留通过水解反应形成的固体和液相SiO 2富集的TEOS聚合物，以便随后的去除和处置。 分子种类选择性流阻碍介质具有多个吸附表面，以形成执行TEOS和水流阻碍功能的表面密度以及固相和液相TEOS聚合物捕集功能。

公开(公告)号：WO2006127693A3

公开(公告)日：2007-04-12

申请号：PCT/US2006019888

申请日：2006-05-23

Applicant: MKS INSTR INC ,  GU YOUFAN ,  NEUMEISTER DAVID

Inventor： GU YOUFAN ,  NEUMEISTER DAVID

IPC: C23C16/44

CPC classification number: C23C16/45544 ,  C23C16/4412

Abstract: A secondary reaction chamber (31) with a mesh reactor element (38) and a heater assembly (34) are positioned in a foreline (12) between a CVD reaction chamber (14) and a vacuum pump (16) to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.

Abstract translation: 具有网状反应器元件（38）和加热器组件（34）的次级反应室（31）位于CVD反应室（14）和真空泵（16）之间的前级管线（12）中，以将所有 以前未反应的前体反应物，以在它们能够达到和损坏真空泵之前将其从流出物中除去。

公开(公告)号：WO2007118156A3

公开(公告)日：2008-05-15

申请号：PCT/US2007066078

申请日：2007-04-05

Applicant: MKS INSTR INC ,  WATLOW ELECTRIC MFG ,  GU YOUFAN ,  KIERNAN JEFFREY D ,  LAWHEAD CHARLES C ,  BOHLINGER WILLIAM C ,  ELLIS ERIC E ,  FOSTER CURTIS A ,  HENTGES JAMES P ,  HOVEN MARK LOUIS-GILMER ,  KREISEL JAMES H ,  LEININGER SHAWN ,  MORAN ROBERT O ,  PETERSON KURT W ,  POWELL JASON R ,  WOLFE DALE T

Inventor： GU YOUFAN ,  KIERNAN JEFFREY D ,  LAWHEAD CHARLES C ,  BOHLINGER WILLIAM C ,  ELLIS ERIC E ,  FOSTER CURTIS A ,  HENTGES JAMES P ,  HOVEN MARK LOUIS-GILMER ,  KREISEL JAMES H ,  LEININGER SHAWN ,  MORAN ROBERT O ,  PETERSON KURT W ,  POWELL JASON R ,  WOLFE DALE T

IPC: H05B1/02 ,  G05D23/19

CPC classification number: H05B1/0244 ,  G05D23/1928 ,  G05D23/1935 ,  G05D23/22 ,  Y10T307/469 ,  Y10T307/484

Abstract: A multiple heater control system (10) includes cables (26), connectors (64, 78, 82, 86), and junction boxes for user-friendly daisy chain connections of heater controllers (20) and heaters (16) in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.

Abstract translation: 多重加热器控制系统（10）包括电缆（26），连接器（64,78,82,86）和接线盒，用于以各种配置的加热器控制器（20）和加热器（16）的用户友好的菊花链连接，或 单独控制加热器系列和/或主从加热器系列的组合。 加热器控制器包括对加热器的AC电力的过程控制和基本上独立于过程控制的上限安全关闭。 加热器控制器还具有基础模块中可变级别的控制，调整，显示和通信功能，可扩展到各种级别，扩展模块可连接到基座模块并可拆卸。 连接器，电缆和接头配置，适配器和闩锁功能增强了用户友好性。

公开(公告)号：WO0171781A3

公开(公告)日：2002-02-28

申请号：PCT/US0109544

申请日：2001-03-22

Applicant: MKS INSTR INC

Inventor： HOLCOMB GARRY ,  GU YOUFAN ,  STAFFORD JAMES ,  MUELLER JAMES ,  WADE STACY

IPC: H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67748 ,  H01L21/67201 ,  H01L21/67253 ,  Y10S414/139

Abstract: Transducer (10) apparatus and method combining both an absolute pressure sensor (20) for sensing absolute pressure in the load lock chamber (60) and a differential pressure sensor (30) for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber (60) and provides control signals for opening an interior door (62) from the load lock chamber (60) into a vacuum processing chamber (70) and for opening an exterior door (64) between ambient atmosphere and the load lock chamber (60). The transducer (10) can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber (60) pressure at a predetermined pressure set point.

Abstract translation: 传感器（10）装置和方法组合用于感测负载锁定室（60）中的绝对压力的绝对压力传感器（20）和差压传感器（30），用于感测环境大气压力和负载压力之间的压力差 锁定室（60），并且提供用于将内门（62）从负载锁定室（60）打开到真空处理室（70）中并且用于打开环境大气和负载锁定室之间的外门（64）的控制信号 （60）。 换能器（10）还可以产生信号以控制在预定压力设定点处从负载锁定室（60）压力的慢速到快速真空泵送的转变。

公开(公告)号：WO03008085A2

公开(公告)日：2003-01-30

申请号：PCT/US0222599

申请日：2002-07-16

Applicant: MKS INSTR INC

Inventor： GU YOUFAN ,  DOZORETZ PAUL ,  MUELLER JAMES ,  GOSS BENJAMIN ,  NEUMEISTER DAVID

IPC: F22B35/00 ,  B01D1/00 ,  F22B1/28 ,  B01J4/00

CPC classification number: B01D1/0082

Abstract: The present invention provides a vapor delivery system and a method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.

Abstract translation: 本发明提供了一种蒸气输送系统和一种根据需要有效产生水蒸气的方法。 更具体地说，本发明通过在蒸发器室内的压力降低时在蒸发器室内保持足够温度的足够体积的水来产生低温水蒸气而不形成冰。

公开(公告)号：WO0049198A9

公开(公告)日：2002-03-28

申请号：PCT/US0004301

申请日：2000-02-18

Applicant: MKS INSTR INC

Inventor： DOZORETZ PAUL ,  GU YOUFAN

IPC: B01D5/00 ,  C23C16/44 ,  H01L21/31 ,  C23C16/00

CPC classification number: H01J37/32844 ,  B01D5/0036 ,  C23C16/4412 ,  Y02C20/30 ,  Y10S438/905

Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed teos, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of absorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

Abstract translation: 用于在真空泵管线中控制来自反应炉流出物的TEOS聚合的TEOS捕集器，SiO 2 CVD工艺包括分子种类选择性流阻碍介质，其吸附并保留来自流出物的TEOS和水分子足够长以消耗基本上所有的水分子 TEOS水解反应同时允许非水解的teos，乙烯和其他气态副产物通过捕集器并保留通过水解反应形成的固体和液相SiO 2富集的TEOS聚合物，以便随后的去除和处置。 分子种类选择性流阻碍介质具有多个吸收表面，以形成执行TEOS和水流阻碍功能的表面密度以及固相和液相TEOS聚合物捕集功能。

公开(公告)号：WO2008005838A3

公开(公告)日：2008-07-31

申请号：PCT/US2007072483

申请日：2007-06-29

Applicant: MKS INSTR INC ,  GU YOUFAN ,  NUESKEN SVEN

Inventor： GU YOUFAN ,  NUESKEN SVEN

IPC: F16K31/40

CPC classification number: F16K31/406 ,  F16K7/17 ,  Y10T137/86614 ,  Y10T137/86686 ,  Y10T137/86919

Abstract: A fast-acting, pneumatic diaphragm valve (10) includes a diaphragm valve closure 'member (20), a pneumatic piston (36) that provides a closure force on the closure member (20), and a solenoid pilot valve (26) that controls pressurized air to the piston to cause the piston (36) to move in a reciprocal manner so that the closure member (20) opens and closes the valve. The valve seat seal (30) can be elastomer for enhancing speed, and the solenoid pilot valve (26) can be positioned and configured with air flow longitudinally- through or past the solenoid armature (40) to enhance speed.

Abstract translation: 一种快速作用的气动隔膜阀（10）包括隔膜阀闭合件（20），在关闭件（20）上提供闭合力的气动活塞（36）和一个电磁导阀（26） 控制到活塞的加压空气以使活塞（36）以往复的方式移动，使得关闭构件（20）打开和关闭阀门。 阀座密封件（30）可以是用于提高速度的弹性体，并且螺线管先导阀（26）可以被定位和配置为沿着螺线管电枢（40）纵向通过或经过螺线管电枢（40）的气流，以提高速度。

公开(公告)号：WO02078818A3

公开(公告)日：2003-08-14

申请号：PCT/US0207839

申请日：2002-03-12

Applicant: MKS INSTR INC

Inventor： LIVINGSTON DARREN ,  GU YOUFAN ,  MUELLER JAMES ,  DOZORETZ PAUL

IPC: B01D45/14 ,  B01D45/16

CPC classification number: B01D45/14

Abstract: Trap apparatus (10) and method for removing contaminants (142) from the gaseous effluent flows (136) from chemical vapor deposition chambers (20) and processes by flowing the particle laden gas (140) into an upper chamber (90) of the trap apparatus, (10) imparting additional kinetic energy to the powder particles (142) to enhance separation of the powder particles (142) from the gas (140), and then flowing the gas (152), sans the powder particles (142), out of the trap (10), while the powder particles (142) fall into and are captured by a lower chamber (92) positioned below the upper chamber (90) and remote from the flowing gas (152). An impeller (120) positioned in the upper chamber (90) in the inlet path (140) imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas (148) into the upper chamber (90) for capture as previously described.

Abstract translation: 捕集装置（10）和用于从化学气相沉积室（20）从气态流出物流（136）去除污染物（142）的方法，以及通过使载有颗粒的气体（140）流入捕集器的上室（90） 装置，（10）向粉末颗粒（142）施加额外的动能，以增强粉末颗粒（142）与气体（140）的分离，然后使没有粉末颗粒（142）的气体（152）流动， （10）中，而粉末颗粒（142）落入并被位于上室（90）下方并远离流动气体（152）的下室（92）捕获。 定位在入口路径（140）中的上腔室（90）中的叶轮（120）赋予额外的动能。 对于一些反应气体系统，具有亲水的旋转生长衬底的任选的反应器增强并加速固体颗粒的生长，然后固体颗粒从介质中移出，并由流动气体（148）进料到上室（90）中以捕获为 之前描述。

公开(公告)号：EP2912358A4

公开(公告)日：2016-06-29

申请号：EP13849699

申请日：2013-10-23

Applicant: MKS INSTR INC

Inventor： NEUMEISTER DAVID ,  LEFEVRE BRADLY ,  GROUT KEVIN ,  GU YOUFAN

IPC: F16K41/10 ,  F16K27/00 ,  F16K31/122

CPC classification number: F16K27/00 ,  C23C16/4412 ,  F16K27/003 ,  F16K27/02 ,  F16K31/122 ,  F16K41/10 ,  F16K51/02 ,  Y10T137/0318 ,  Y10T137/7043 ,  Y10T137/87877

Abstract: An expandable and contractible shield around a bellows in a valve protects the bellows from corrosive gases and solid particles in the valve chamber. In a manifold valve assembly with multiple outlet ports and multiple valves in a common valve chamber, a respective expandable and contractible shield around each respective bellows of each respective valve in the assembly separates each bellows from corrosive gases and solid particles in the common valve chamber regardless of whether one or all of the valves in the assembly is opened or closed.

Abstract translation: 阀门周围的可膨胀和收缩的屏蔽罩可保护波纹管免受阀室中的腐蚀性气体和固体颗粒的影响。 在具有多个出口端口和多个阀门的通用阀门组件中，组件中每个相应阀门的每个相应波纹管周围的相应的可扩张和可收缩的屏蔽将每个波纹管与普通阀室中的腐蚀性气体和固体颗粒分开 是否打开或关闭组件中的一个或所有阀。

公开(公告)号：EP1171644A4

公开(公告)日：2002-08-21

申请号：EP00921335

申请日：2000-02-18

Applicant: MKS INSTR INC

Inventor： DOZORETZ PAUL ,  GU YOUFAN

IPC: B01D5/00 ,  C23C16/44 ,  H01L21/31 ,  C23C16/00 ,  C23C16/40

CPC classification number: H01J37/32844 ,  B01D5/0036 ,  C23C16/4412 ,  Y02C20/30 ,  Y10S438/905

Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed teos, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of absorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

Abstract translation: 用于在真空泵管线中控制来自反应炉流出物的TEOS聚合的TEOS捕集器，SiO 2 CVD工艺包括分子物质选择性流动阻碍介质，其吸附并保留来自流出物的TEOS和水分子足够长以消耗基本上所有的水分子 TEOS水解反应，同时允许非水解的TEOS，乙烯和其他气态副产物通过捕集器并保持通过水解反应形成的固体和液相SiO 2富集的TEOS聚合物，以便随后的去除和处置。 分子种类选择性流动阻碍介质具有多个吸附表面，以形成执行TEOS和水流阻碍功能的表面密度以及固相和液相TEOS聚合物捕集功能。