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公开(公告)号：WO2015148005A3
公开(公告)日：2015-12-03
申请号：PCT/US2015015810
申请日：2015-02-13
Applicant: MKS INSTR INC
Inventor： GU LEI , BART STEPHEN F , WENZEL OLE
IPC: G01L21/12
Abstract: Micro-Pirani gauge vacuum gauges are described that use low-thermal conductivity support elements. A micro-Pirani gauge or vacuum sensor can include a heating element operative to heat a gas and to produce a signal corresponding to the pressure of the gas; a platform configured to receive the heating element, with the platform having a first coefficient of thermal conductivity; and a support element connected to a substrate and configured to support the platform with the heating element within an aperture disposed in the substrate, with the support element having a second coefficient of thermal conductivity, where the second coefficient of thermal conductivity is less than the first coefficient of thermal conductivity. Multimode pressure sensing including a micro-Pirani gauge are also described.
Abstract translation: 描述了使用低导热性支撑元件的微皮拉尼真空计。 微型Pirani测量仪或真空传感器可以包括加热元件，其操作用于加热气体并产生对应于气体压力的信号; 平台，其被配置为接收所述加热元件，所述平台具有第一导热系数; 以及支撑元件，其连接到基板并且被配置为将所述平台与所述加热元件支撑在设置在所述基板内的孔内，所述支撑元件具有第二导热系数，其中所述第二导热系数小于所述第一导热系数 导热系数。 还描述了包括微型Pirani压力计的多模式压力感测。
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Patent Agency Ranking
公开(公告)号：DE112004002274T5
公开(公告)日：2006-09-21
申请号：DE112004002274
申请日：2004-11-24
Applicant: MKS INSTR INC
Inventor： DOZORETZ PAUL , GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
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公开(公告)号：DE112004002274B4
公开(公告)日：2010-10-28
申请号：DE112004002274
申请日：2004-11-24
Applicant: MKS INSTR INC
Inventor： DOZORETZ PAUL , GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
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公开(公告)号：GB2423823B
公开(公告)日：2007-02-28
申请号：GB0610004
申请日：2004-11-24
Applicant: MKS INSTR INC
Inventor： DOZORETZ PAUL , GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
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公开(公告)号：SG11201607491UA
公开(公告)日：2016-10-28
申请号：SG11201607491U
申请日：2015-02-13
Applicant: MKS INSTR INC
Inventor： GU LEI , BART STEPHEN F , WENZEL OLE
IPC: G01L21/12
Abstract: Micro-Pirani gauge vacuum gauges are described that use low-thermal conductivity support elements. A micro-Pirani gauge or vacuum sensor can include a heating element operative to heat a gas and to produce a signal corresponding to the pressure of the gas; a platform configured to receive the heating element, with the platform having a first coefficient of thermal conductivity; and a support element connected to a substrate and configured to support the platform with the heating element within an aperture disposed in the substrate, with the support element having a second coefficient of thermal conductivity, where the second coefficient of thermal conductivity is less than the first coefficient of thermal conductivity. Multimode pressure sensing including a micro-Pirani gauge are also described.
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公开(公告)号：GB2423823A
公开(公告)日：2006-09-06
申请号：GB0610004
申请日：2004-11-24
Applicant: MKS INSTR INC
Inventor： DOZORETZ PAUL , GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale. To achieve the foregoing objects the method and apparatus for measuring absolute pressure in a chamber (see figure) includes determining a correlation factor between absolute and differential pressure measurements taken simultaneously at a pressure where the absolute pressure in the chamber can be measured accurately, and adjusting differential pressure measurements with the correlation factor to provide virtual absolute prenure measurements.
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