公开(公告)号：JP2000183364A

公开(公告)日：2000-06-30

申请号：JP35025099

申请日：1999-12-09

Applicant: MOTOROLA INC

Inventor： KOCH DANIEL J ,  HAMMOND JONATHAN H ,  KOURY JR DANIEL N ,  GORELL JONATHAN F

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide a reliable acceleration sensor that can endure strong impacts in all directions. SOLUTION: A sensor is made movable on a support substrate and the surface of the support substrate, is located on an electrode 110 constituted of a first material and a part of the electrode 110, limits the movement of the electrode 110, lies outside the periphery of a structure 160 composed of a second material that is different from the first one and the electrode 110, and has a bonding pad 170 which is made of the second material.

公开(公告)号：JPH1168122A

公开(公告)日：1999-03-09

申请号：JP20723598

申请日：1998-07-06

Applicant: MOTOROLA INC

Inventor： GUTTERIDGE RONALD J ,  KOURY JR DANIEL N ,  KOCH DANIEL J ,  HAMMOND JONATHON H

IPC: B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125 ,  G03F7/26 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor element with a structure that prevents damages with respect to a movable mass in an accelerometer without enlarging the size thereof. SOLUTION: A sensor 11 has a movable plate 16 which moves according to external acceleration. The movable plate 16 has a finger 17 which is joined capacitively with fingers 13 and 14 mounted on a substrate 12. The movable plate 16 is stopped by using a movement stopping part 19, before the finger 17 on the movable plate 16 collides with the fingers 13 and 14 on the substrate 12.