公开(公告)号：DE19830476A1

公开(公告)日：1999-02-04

申请号：DE19830476

申请日：1998-07-08

Applicant: MOTOROLA INC

Inventor： GUTTERIDGE RONALD J ,  KOURY JUN DANIEL N ,  KOCH DANIEL J ,  HAMMOND JONATHON H

IPC: B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125 ,  G03F7/26 ,  H01L29/84 ,  H01L49/00 ,  H01L23/50

Abstract: The semiconductor device (10) includes a substrate (12) above which a movable plate (16) with an opening (18) is arranged. A movement stopper (19) contacts the substrate and extends through at least part of the opening in the plate. The movable plate defines a plane which is parallel to the surface (35) of the substrate. The plate comprises single crystal silicon, polysilicon, amorphous silicon, metal or metal silicide. A sensor included in the semiconductor device is also claimed.

公开(公告)号：DE19959135A1

公开(公告)日：2000-06-15

申请号：DE19959135

申请日：1999-12-08

Applicant: MOTOROLA INC

Inventor： KOCH DANIEL J ,  HAMMOND JONATHAN H ,  KOURY JUN DANIEL N ,  GORELL JONATHAN F

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  B81C1/00 ,  B81B3/00

Abstract: Sensor production comprises forming a structure which limits movement of a mobile electrode made of different material. Sensor production process comprises: (a) using a first material to form a mobile electrode (110) joined to the surface of a carrier substrate (200); and (b) using a second different material to form at least a section of a structure (160) which is joined to the substrate and which limits the mobility of the electrode. An Independent claim is also included for a sensor produced by the above process. Preferred Features: The first material consists of doped polysilicon and the second material consists of aluminum and silicon.