公开(公告)号：JPH10177838A

公开(公告)日：1998-06-30

申请号：JP36191997

申请日：1997-12-10

Applicant: MOTOROLA INC

Inventor： SONG JOHN ,  NILSSON THOMAS

IPC: H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide the manufacturing method for field emission element capable of preventing the formation of defects within a dielectric layer. SOLUTION: The manufacturing method for a diamond like carbon field emission element 300 contains a process for forming a ballast layer on line conductors 330, a process for forming a surface emitter 370 made of diamond like carbon on the ballast layer so as to position to a central well region 332 in the line conductors 330, a process for forming an electric field shaper layer on the ballast layer and the surface emitter, a process for patterning on the ballast layer and electric field shaper layer to form the electric field shaper layer having a ballast 365 and facing edges, and for prescribing a smooth continuous surface 371 together with the facing edges of the line conductor, a process for accumulating a blanket dielectric layer, and a process for forming an emission well 360 on the central well region.

公开(公告)号：DE69714392T2

公开(公告)日：2003-01-16

申请号：DE69714392

申请日：1997-11-26

Applicant: MOTOROLA INC

Inventor： SONG JOHN ,  NILSSON THOMAS

IPC: H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01J31/12 ,  H01J3/02

Abstract: The device comprises a supporting substrate having a major surface, a column conductor formed on the major surface of the supporting substrate and having a central well region and opposed edges, an emissive structure including a ballast disposed on the column conductor having opposed edges co-extensive with the opposed edges of the column conductor, and a surface emitter having opposed edges being in registration with the central well region of the column conductor and spaced from the opposed edges of the ballast. A field shaper (375, 875) circumscribing the surface emitter and disposed on the ballast has opposed edges which are coextensive with the opposed edges of the ballast. A dielectric layer is disposed on the field shaper and on the opposed edges of the column conductor, the opposed edges of the ballast, and the opposed edges of the field shaper. The row conductor is formed on the dielectric layer. Ballast is made from material having resistivity within range of 100 Ohm per cm to 10K Ohm per cm. Field shaper is made from amorphous silicon.

公开(公告)号：DE69714392D1

公开(公告)日：2002-09-05

申请号：DE69714392

申请日：1997-11-26

Applicant: MOTOROLA INC

Inventor： SONG JOHN ,  NILSSON THOMAS

IPC: H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01J31/12 ,  H01J3/02

Abstract: The device comprises a supporting substrate having a major surface, a column conductor formed on the major surface of the supporting substrate and having a central well region and opposed edges, an emissive structure including a ballast disposed on the column conductor having opposed edges co-extensive with the opposed edges of the column conductor, and a surface emitter having opposed edges being in registration with the central well region of the column conductor and spaced from the opposed edges of the ballast. A field shaper (375, 875) circumscribing the surface emitter and disposed on the ballast has opposed edges which are coextensive with the opposed edges of the ballast. A dielectric layer is disposed on the field shaper and on the opposed edges of the column conductor, the opposed edges of the ballast, and the opposed edges of the field shaper. The row conductor is formed on the dielectric layer. Ballast is made from material having resistivity within range of 100 Ohm per cm to 10K Ohm per cm. Field shaper is made from amorphous silicon.

公开(公告)号：AU5469200A

公开(公告)日：2001-02-19

申请号：AU5469200

申请日：2000-06-07

Applicant: MOTOROLA INC

Inventor： SMITH PETER A ,  YAMAMOTO JOYCE K ,  AMRINE CRAIG ,  NILSSON THOMAS ,  SMITH STEVEN M

IPC: H01J9/24 ,  H01J9/18 ,  H01J29/87 ,  H01J31/12 ,  H01J29/02

Abstract: A method for fabricating a field emission display (100) includes the steps of providing a cathode plate (102), providing an anode plate (104), providing a spacer substrate (160) made from a bulk spacer material (109), cutting the spacer substrate (160) to define a spacer (108) having a surface (107), passivating the surface (107) of the spacer (108) using the bulk spacer material (109) to form a passivation layer, and disposing the spacer (108) between the cathode plate (102) and the anode plate (104). A field emission display (100) which includes a cathode plate (102) having a plurality of electron emitters (124), an anode plate (104) opposing the cathode plate (102), and a spacer (108) extending between the cathode plate (102) and anode plate (104). The spacer (108) has a passivation layer made from bulk spacer material (109).