公开(公告)号：WO1995005681A1

公开(公告)日：1995-02-23

申请号：PCT/US1994007777

申请日：1994-07-11

Applicant: MOTOROLA INC.

Inventor： MOTOROLA INC. ,  HAAS, Kevin, L. ,  HAAS, Ken, A. ,  VOUGHT, Kimber, J.

IPC: H01L41/08

CPC classification number: H03H9/0509 ,  H03H9/0514 ,  H04L29/12009 ,  H04L61/00 ,  H05K3/321

Abstract: A surface-mountable crystal resonator (100) is provided in the following manner. A first predetermined electrode pattern (105) and a second predetermined electrode pattern (201) are formed on a first major surface (104) and a second major surface (200), respectively, of a piezoelectric crystal substrate (101). Additionally, a first predetermined attachment electrode pattern (106), electrically coupled to the second predetermined attachment electrode pattern, and a second predetermined attachment electrode pattern (202), electrically coupled to the first predetermined attachment electrode pattern, are formed on a first attachment area (102) and a second attachment area (103), respectively. The first and second attachment areas include extensions (107) that, when mounted, allow a conductive adhesive (301), placed on a mounting substrate (300), to flow and establish electrical connections with the first and second predetermined attachment electrode patterns.

Abstract translation: 以下列方式提供表面安装晶体谐振器（100）。 分别在压电晶体基板（101）的第一主表面（104）和第二主表面（200）上形成第一预定电极图案（105）和第二预定电极图案（201）。 另外，电耦合到第二预定附接电极图案的第一预定附接电极图案（106）和电耦合到第一预定附接电极图案的第二预定附接电极图案（202）形成在第一附接区域 （102）和第二附接区域（103）。 第一和第二附接区域包括延伸部（107），其在安装时允许放置在安装基板（300）上的导电粘合剂（301）流动并建立与第一和第二预定附接电极图案的电连接。

公开(公告)号：WO1996039710A2

公开(公告)日：1996-12-12

申请号：PCT/US1996004565

申请日：1996-04-11

Applicant: MOTOROLA INC.

Inventor： MOTOROLA INC. ,  HAAS, Kevin, L. ,  WITTE, Robert, S. ,  ZIMNICKI, Charles, L. ,  ALHAYEK, Iyad

IPC: H01L00/00

CPC classification number: H03H3/02 ,  H01L41/332

Abstract: A method for etching (200) photolithographically produced quartz crystal blanks for singulation. First, a quartz wafer is plated on both sides with metal and subsequently coated on both sides with photoresist (202). Second, the photoresist is patterned and developed and the metal layers etched to define the periphery of a quartz blank with a narrow quartz channel exposed between the blank to be singulated and the parent quartz wafer (204). Third, the quartz channel is preferentially etched partially into the wafer along parallel atomic planes to provide a mechanically weak junction between the quartz wafer and the blank to be singulated, while the periphery around the remainder of the quartz blank is etched completely through the parent quartz wafer (206). Fourth, the photoresist layers are stripped from the quartz wafer (208). Finally, the quartz blank is cleaved substantially along the bottom of the quartz channel to singulate the crystal blank from the wafer (210).

Abstract translation: 用于刻蚀（200）光刻制造的用于单分割的石英晶体坯料的方法。 首先，用金属在两面涂覆石英晶片，随后用光致抗蚀剂（202）在两面涂覆石英晶片。 第二，对光致抗蚀剂进行图案化和显影，并且金属层被蚀刻以限定石英坯料的外围，其中窄的石英通道暴露在待分割的坯料和母体石英晶片（204）之间。 第三，石英沟道优先沿着平行的原子平面部分地蚀刻到晶片中，以在石英晶片和待分割的坯料之间提供机械上的弱连接，而石英坯料的其余部分的周边被完全蚀刻通过母体石英 晶片（206）。 第四，从石英晶片（208）剥离光致抗蚀剂层。 最后，石英坯料基本沿着石英通道的底部裂开，以从晶片（210）上分离晶体坯料。

公开(公告)号：WO1998019349A1

公开(公告)日：1998-05-07

申请号：PCT/US1997015106

申请日：1997-08-27

Applicant: MOTOROLA INC.

Inventor： MOTOROLA INC. ,  HOVEY, Scott, A. ,  KNECHT, Thomas, A. ,  HAAS, Kevin, L. ,  ZHANG, Weiping ,  ROSE, Clifford, L.

IPC: H01L41/22

CPC classification number: H03H9/0519

Abstract: A method and device for mounting a piezoelectric element in a package without the use of adhesives. The piezoelectric device includes a substrate (104) with at least two electrical traces (118), a piezoelectric element (102) with a top electrode (108) and a bottom electrode (106), and a wirebond ball bump (100). The ball bump is ultrasonically bonded to one of the electrical traces (118) on the substrate (104), and the bottom electrode (106) of the piezoelectric element (102) is ultrasonically bonded to the ball bump (100). A wirebond (110) connects the top electrode (108) with the remaining electrical trace (118) of the substrate (104). The device is provided in a conventionally sealed package.

Abstract translation: 一种用于在不使用粘合剂的情况下将压电元件安装在包装中的方法和装置。 所述压电器件包括具有至少两个电迹线（118）的基底（104），具有顶部电极（108）和底部电极（106）的压电元件（102）和引线键球凸点（100）。 将球凸块超声波接合到基板（104）上的一个电迹线（118）上，并将压电元件（102）的底部电极（106）超声波接合到球凸块（100）上。 引线键（110）将顶部电极（108）与衬底（104）的剩余电迹线（118）连接。 该设备以常规密封的包装提供。

公开(公告)号：EP0830732A2

公开(公告)日：1998-03-25

申请号：EP96912542.0

申请日：1996-04-11

Applicant: MOTOROLA, INC.

Inventor： HAAS, Kevin, L. ,  WITTE, Robert, S. ,  ZIMNICKI, Charles, L. ,  ALHAYEK, Iyad

IPC: H01L21 ,  H01L41 ,  H03H3 ,  H03H9

CPC classification number: H03H3/02 ,  H01L41/332

Abstract: A method for etching (200) photolithographically produced quartz crystal blanks for singulation. First, a quartz wafer is plated on both sides with metal and subsequently coated on both sides with photoresist (202). Second, the photoresist is patterned and developed and the metal layers etched to define the periphery of a quartz blank with a narrow quartz channel exposed between the blank to be singulated and the parent quartz wafer (204). Third, the quartz channel is preferentially etched partially into the wafer along parallel atomic planes to provide a mechanically weak junction between the quartz wafer and the blank to be singulated, while the periphery around the remainder of the quartz blank is etched completely through the parent quartz wafer (206). Fourth, the photoresist layers are stripped from the quartz wafer (208). Finally, the quartz blank is cleaved substantially along the bottom of the quartz channel to singulate the crystal blank from the wafer (210).