公开(公告)号：US11946945B2

公开(公告)日：2024-04-02

申请号：US17388125

申请日：2021-07-29

Applicant: Materials Analysis Technology Inc.

Inventor： Keng-Chieh Chu ,  Tsung-Ju Chan ,  Chun-Wei Wu ,  Hung-Jen Chen

IPC: H01J37/20 ,  G01N35/00 ,  G06K7/14 ,  H01J37/26

CPC classification number: G01N35/00732 ,  G06K7/1413 ,  H01J37/26 ,  G01N2035/00752 ,  H01J2237/20292

Abstract: A sample analyzing method and a sample preparing method are provided. The sample analyzing method includes a sample preparing step, a placing step, and an analyzing step. The sample preparing step includes an obtaining step implemented by obtaining an identification information; and a marking and placing step implemented by placing a sample carrying component having a sample disposed thereon into a marking equipment, allowing the marking equipment to utilize the identification information to form an identification structure on the sample carrying component, and placing the sample carrying component into one of the accommodating slots according to the identification information. The placing step is implemented by taking out the sample carrying component from one of the accommodating slots and placing the sample carrying component into an electron microscope equipment. The analyzing step is implemented by utilizing the electron microscope equipment to photograph the sample to generate an analyzation image.

公开(公告)号：US11955312B2

公开(公告)日：2024-04-09

申请号：US17560460

申请日：2021-12-23

Applicant: Materials Analysis Technology Inc.

Inventor： Chien-Wei Wu ,  Keng-Chieh Chu ,  Yung-Sheng Fang ,  Chun-Wei Wu ,  Hung-Jen Chen

IPC: H01J37/317 ,  H01J37/20

CPC classification number: H01J37/3178 ,  H01J37/20

Abstract: A physical analysis method, a sample for physical analysis and a preparing method thereof are provided. The preparing method of the sample for physical analysis includes: providing a sample to be inspected; and forming a contrast enhancement layer on a surface of the sample to be inspected. The contrast enhancement layer includes a plurality of first material layers and a plurality of second material layers stacked upon one another. The first material layer and the second material layer are made of different materials. Each one of the first and second material layers has a thickness that does not exceed 0.1 nm. In an image captured by an electron microscope, a difference between an average grayscale value of a surface layer image of the sample to be inspected and an average grayscale value of an image of the contrast enhancement layer is at least 50.