公开(公告)号：US20030030998A1

公开(公告)日：2003-02-13

申请号：US10186332

申请日：2002-06-28

Applicant: MEMSCAP

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H05K007/02 ,  H05K007/06 ,  H05K007/08 ,  H05K007/10

CPC classification number: H03H9/02259 ,  H01H50/005 ,  H01H59/0009 ,  H03H9/2405 ,  H03H2009/02496

Abstract: Microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate, and comprising two input terminals and two output terminals, characterized in that it also comprises: a moveable element (4) connected to the substrate by at least one deformable portion, and including a region made of a ferromagnetic material; a metal coil (5) connected to the input terminals or output terminals (30, 31), capable of interacting magnetically with the ferromagnetic region of the moveable element (4); a surface forming a first electrode (6), connected to one of the output terminals or input terminals, placed opposite a complementary surface secured to the moveable element (4), this complementary surface forming a second electrode connected to the other of the output or input terminals, and being capable of interacting electrostatically with the first electrode (6).

Abstract translation: 提供过滤功能的微电子机械部件（1），其在半导体基板上制造，并且包括两个输入端子和两个输出端子，其特征在于还包括：可移动元件（4），其通过至少一个可变形部分 并且包括由铁磁材料制成的区域; 连接到能够与可移动元件（4）的铁磁区域相互作用的输入端子或输出端子（30,31）的金属线圈（5）; 形成第一电极（6）的表面，其连接到与固定到所述可移动元件（4）的互补表面相对的所述输出端子或输入端子之一，所述互补表面形成连接到所述输出端或另一端的另一个的第二电极 输入端子，并且能够与第一电极（6）静电相互作用。

公开(公告)号：US20030030527A1

公开(公告)日：2003-02-13

申请号：US10213928

申请日：2002-08-06

Applicant: MEMSCAP Parc Technologique des Fontaines

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H01F021/06

CPC classification number: H03H9/02259 ,  H03H9/02377 ,  H03H2009/02496

Abstract: A microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate (10) and comprising two input terminals (7, 8) and two output terminals (26, 27), which also comprises: a metal input coil (2), connected to the input coils (7, 8) and capable of producing a magnetic field when a current flows through it; a movable element (3), connected to the substrate by at least one deformable portion and including at least one region (11, 12) made of a ferromagnetic material, said movable element (3) being capable of moving under the effect of the force, to which the region (11) made of a ferromagnetic material is subject, generated by the magnetic field produced by the input coil (2); an output member (4) forming a magnetic sensor, connected to the output terminals (26, 27) and capable of producing an electrical signal that can be varied according to the movement of the movable element (3).

Abstract translation: 一种提供过滤功能的微机电部件（1），其在基于半导体的基板（10）上产生并且包括两个输入端子（7,8）和两个输出端子（26,27），其还包括：金属输入线圈 ），连接到输入线圈（7,8），并且当电流流经时产生磁场; 可移动元件（3），其通过至少一个可变形部分连接到所述基板并且包括由铁磁材料制成的至少一个区域（11,12），所述可移动元件（3）能够在所述力的作用下移动 由铁磁材料制成的区域（11）由输入线圈（2）产生的磁场产生; 形成磁传感器的输出构件（4），连接到输出端子（26,27），并且能够产生可根据可移动元件（3）的移动而改变的电信号。

公开(公告)号：US20020186114A1

公开(公告)日：2002-12-12

申请号：US10206284

申请日：2002-07-26

Applicant: Memscap

Inventor： Laurent Basteres ,  Ahmed Mhani ,  Francois Valentin ,  Jean-Michel Karam

IPC: H01F005/00

CPC classification number: H01F17/0006 ,  H01F2017/0046 ,  H01L23/645 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An inductive component (1), especially intended to be incorporated into a radiofrequency circuit, comprising: a substrate layer (2); a flat inductor formed from a metal strip (3) wound in a spiral; wherein: the substrate layer (2) is made of quartz; the metal strip (3) is made of copper and has a thickness (E3) of greater than 10 microns.

Abstract translation: 一种特别旨在并入射频电路中的电感元件（1），包括：衬底层（2）; 由螺旋缠绕的金属条（3）形成的扁平电感器; 其中：所述基底层（2）由石英制成; 金属条（3）由铜制成并且具有大于10微米的厚度（E3）。

公开(公告)号：US20020160576A1

公开(公告)日：2002-10-31

申请号：US10177435

申请日：2002-06-21

Applicant: Memscap S.A.

Inventor： Laurent Basteres ,  Ahmed Mhani ,  Francois Valentin ,  Jean-Michel Karam

IPC: H01L021/20

CPC classification number: H01L28/10 ,  H01F17/0006 ,  H01L23/5227 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: A monolithic integrated circuit (1) incorporating an inductive component (2) and comprising: a semiconductor substrate layer (2); a passivation layer (4) covering the substrate layer (2); metal contact pads (5) connected to the substrate (2) and passing through the passivation layer (4) in order to be flush with the upper face (6) of the passivation layer (4); which circuit also includes a spiral winding (20) which forms an inductor and lies in a plane parallel to the upper face (6) of the passivation layer (4), said winding (20) consisting of copper turns (21-23, 27, 28) having a thickness of greater than 10 microns, the winding ends forming extensions (12) which extend below the plane of the winding (20) and are connected to the contact pads (5).

Abstract translation: 一种结合电感元件（2）的单体集成电路（1），包括：半导体衬底层（2）; 覆盖衬底层（2）的钝化层（4）; 金属接触焊盘（5），其连接到衬底（2）并通过钝化层（4）以与钝化层（4）的上表面（6）齐平; 该电路还包括形成电感器并且位于平行于钝化层（4）的上表面（6）的平面中的螺旋绕组（20），所述绕组（20）由铜匝（21-23,27） ，28），所述绕组端形成在所述绕组（20）的平面下方延伸并延伸到所述接触焊盘（5）的延伸部（12）。