公开(公告)号：WO2005006365A1

公开(公告)日：2005-01-20

申请号：PCT/US2004/018576

申请日：2004-06-14

Applicant: MEMSCAP, INC. ,  GLUKH, Konstantin ,  WOOD, Robert, L. ,  AGRAWAL, Vivek

Inventor： GLUKH, Konstantin ,  WOOD, Robert, L. ,  AGRAWAL, Vivek

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  H01H36/00 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2036/0093

Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

Abstract translation: 磁开关包括其中具有凹部的基板。 转子或转子设置在基板上。 该转子包括一个位于该凹部之上的尾部，以及一个在凹槽外部的基底上延伸的头部。 转子可以由铁磁材料制成，并且被配置为响应于改变的磁场而使凹部中的尾部旋转。 还提供了第一和第二磁性开关触点，其被配置为响应于改变的磁场而响应于凹部中尾部的旋转而彼此之间形成或断开电连接。 还描述了相关的操作和制造方法。

公开(公告)号：JP2003234413A

公开(公告)日：2003-08-22

申请号：JP2002346552

申请日：2002-11-28

Applicant: MEMSCAP

Inventor： GIRARDIE LIONEL ,  DAVID JEAN-BAPTISTE

IPC: H01F17/00 ,  H01F41/04 ,  H01L21/3205 ,  H01L21/822 ,  H01L23/52 ,  H01L23/522 ,  H01L23/532 ,  H01L27/04

Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic component incorporated with a guidance micro component disposed on a substrate. SOLUTION: This component includes continuous layers (10, 10a) of a substance with a low relative dielectric constant, which are isolated by a hard mask layer (12) and lie on the upper surface of a substrate (1), a multiplicity of metallic bent portions (30-31) defined on the continuous layers (10, 10a) of a substance with a low relative dielectric constant, and a copper-diffused barrier layer (15) sandwiched between the metallic bent portions (30-31) and the layers of a substance with a low relative dielectric constant, which is disposed immediately under this layer. The substrate (1) is a semiconductor substrate, or a glass or quartz-type amorphous substrate for forming an integrated circuit. The substance with a low relative dielectric constant deposited on the substrate (1) is preferably benzocyclobutene. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2003152488A

公开(公告)日：2003-05-23

申请号：JP2002228011

申请日：2002-08-05

Applicant: MEMSCAP

Inventor： MHANI AHMED ,  FEDELI JEAN-MARC

IPC: B81B7/02 ,  H01F21/06 ,  H01F27/00 ,  H03H5/12 ,  H03H7/12 ,  H03H9/02 ,  H03H9/24

Abstract: PROBLEM TO BE SOLVED: To provide a micromachine component which is increased in resonance frequency for a filter manufactured by using an MEMS (Microelectromechanical System). SOLUTION: The micromachine component 1 is manufactured on a semiconductor motherboard 10, is provided with input terminals 7, 8 and output terminals 26, 27, and exhibits a filtering function. The component 1 is provided with a metal input coil 2 which is connected to the terminals 7, 8 and can generate a magnetic field when a current flows therethrough; a movable constituent 3 which is connected to the board by at least one deformation portion, includes at least one region 11, 12 formed of a ferromagnetic material, and can move under a force to which the region 11 made of a ferromagnetic material is exposed and which is generated by the magnetic field generated by an input coil 2; and an output member 4 which is connected to the terminals 26, 27 and constitutes a magnetic field sensor capable of generating an electric signal being changeable by the movement of the constituent 3.

公开(公告)号：WO2005022452A3

公开(公告)日：2005-03-10

申请号：PCT/FR2004/050384

申请日：2004-08-19

Applicant: MEMSCAP ,  HELIN, Philippe ,  RANSCH, Pascal

Inventor： HELIN, Philippe ,  RANSCH, Pascal

IPC: G06K19/063

Abstract: L'invention concerne un dispositif de marquage (1) réalisé à partir d'un élément en matériau semi-conducteur, sur la face duquel sont creusés des motifs (2-4, 12-14) dont l'agencement est représentatif d'au moins une information. La profondeur des motifs (2-4, 12-14) est variable d'un motif à l'autre, et peut adopter une pluralité de valeurs distinctes, représentatives d'une information supplémentaire. L'invention concerne également un appareil de détection de tels marquages, et des articles intégrant ce type de dispositif de marquage dans la matière les composant.

公开(公告)号：JP2003234412A

公开(公告)日：2003-08-22

申请号：JP2002346551

申请日：2002-11-28

Applicant: MEMSCAP

Inventor： GIRARDIE LIONEL ,  DAVID JEAN-BAPTISTE

IPC: H01L21/768 ,  H01L21/02 ,  H01L21/288 ,  H01L21/3205 ,  H01L21/822 ,  H01L23/12 ,  H01L23/15 ,  H01L23/52 ,  H01L23/522 ,  H01L27/04 ,  H01L27/08

Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic component incorporated with a guidance micro component disposed on a substrate. SOLUTION: This component includes a layer (10) of a substance with a low relative dielectric constant formed on the upper surface of a substrate (1), a multiplicity of metallic bent portions (30-31) defined on the layer (10) of a substance with a low relative dielectric constant, and a copper-diffused barrier layer (15) sandwiched between the metallic bent portions (30-31) and the layer (10) of a substance with a low relative dielectric constant. The substrate (1) is a semiconductor substrate, or a glass or quartz-type amorphous substrate for forming an integrated circuit. The substance with a low relative dielectric constant deposited on the substrate (1) is preferably benzocyclobutene. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2003133880A

公开(公告)日：2003-05-09

申请号：JP2002192488

申请日：2002-07-01

Applicant: MEMSCAP

Inventor： MHANI AHMED ,  FEDELI JEAN-MARC

IPC: B81B7/02 ,  H01H50/00 ,  H01H59/00 ,  H03H5/12 ,  H03H9/02 ,  H03H9/24

Abstract: PROBLEM TO BE SOLVED: To provide an MEMS component. SOLUTION: This microelectro-mechanical component 1 formed at the substrate of a semiconductor base, and provided with two input terminals and two output terminals is constituted of a movable element 4 connected to the substrate by at least one deformable part, and provided with a region constituted of ferromagnetic materials, a metallic coil 5 connected to each input terminal or each output terminal 30 and 3, and allowed to magnetically interact with the ferromagnetic region of the movable element 4, and a face forming complementarily oppositely disposed first electrodes 6 connected to one of either each output terminal or each input terminal, and mounted on the movable element 4. The complementary face forms a second electrode connected to the other of either each output terminal or input terminal, and allowed to interact with the first electrodes 6.

公开(公告)号：JP2002052500A

公开(公告)日：2002-02-19

申请号：JP2001143989

申请日：2001-05-14

Applicant: MEMSCAP ,  PLANHEAD SILMAG PHS

Inventor： CHARRIER CATHERINE ,  BOUCHON ERIC ,  CAMPO ALAIN ,  IMBERT GUY ,  VALENTIN FRANCOIS ,  BASTERES LAURENT

IPC: B81C1/00 ,  B81B3/00 ,  H01G5/16 ,  H01H1/00 ,  H01H11/00 ,  H01H13/52

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic micro component with a fixed plate and a deformable film facing each other under a room temperature. SOLUTION: This manufacturing method is characterized in having a stage of depositing a first metal layer to become the fixed plate on an oxide layer 2, a stage of depositing metal ribbons 10 and 11 acting as spacers between the fixed plate 1 and the deformable film 20 at least in a part of the circumferential edge of the fixed plate 1 in its both sides, a stage of depositing a sacrifice resin layer 15 on all over the fixed plate; a stage of forming a plurality of wells on the surface of the sacrifice resin layer by lithography, a stage of depositing, at least, a metal region which forms the deformable film 20 in the wells formed on the sacrifice resin layer 15 and extends between the metal ribbons disposed in both sides of the fixed plate; and a stage of removing the sacrifice layer.

公开(公告)号：JP2004004713A

公开(公告)日：2004-01-08

申请号：JP2003100764

申请日：2003-04-03

Applicant: MEMSCAP

Inventor： KHALIL DIAA ,  MADKOUR KAREEM ,  SAADANY BASSAM ,  BADRELDIN TAREK ,  HELIN PHILIPPE

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/04 ,  G02B5/08 ,  G02B6/35

Abstract: PROBLEM TO BE SOLVED: To provide an optical switching matrix in which the insertion loss with respect to a propagating beam is reduced. SOLUTION: The optical switching matrix includes at least one set of input optical fibers (12) and at least one set of output optical fibers (14), which are arranged so as to be perpendicular each other, a set of movable mirrors (5, 13), which are arranged at the cross points of the directions defined by a plurality of optical fibers, and a set of channels and a set of channels formed between the mirrors. Another set of mirrors are formed on a first wafer (2); the first wafer is covered with a second wafer (21); a plurality of channels (38) are formed between protruded parts (34) under the second substrate wafer; and the protruded parts are provided with housings (33), in which the movable mirrors can be moved. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003282727A

公开(公告)日：2003-10-03

申请号：JP2003051816

申请日：2003-02-27

Applicant: Memscap ,  メムスカップ

Inventor： GIRARDIE LIONEL

IPC: H01L27/04 ,  C23C16/40 ,  C23C16/44 ,  H01L21/28 ,  H01L21/316 ,  H01L21/822 ,  H01L29/51

CPC classification number: C23C16/40 ,  H01L21/28167 ,  H01L21/31604 ,  H01L29/511

Abstract: PROBLEM TO BE SOLVED: To provide a capacitive structure in which manufacturing is easy and which can be formed at a final visible metallized level of an electronic microcomponent having capacitance particularly per higher unit area than a normal value.
SOLUTION: The electronic microcomponent is assembled with the capacitive structure formed on the top of the final visible metallized level manufactured of a substrate and formed in the substrate. The structure has two electrodes, one of which includes an array of superposed fins deviated from each other with respect to a central essential part, and the other of which includes an array of two fins, each of which is alternately disposed with the fins of the first electrode, coupled by common walls, two of which are coupled with each other above the first electrode.
COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种电容结构，其制造容易并且可以形成在电子微元件的最终可见金属化水平上，该电子微元件的电容特别是比正常值高的单位面积。 解决方案：电子微组件与形成在基板上形成的最终可见金属层的顶部上形成的电容结构组装在一起。 该结构具有两个电极，其中一个电极包括相对于中心基本部分彼此偏离的叠置的阵列阵列，另一个电极包括两个翅片的阵列，每个翅片交替地布置有 第一电极通过公共壁耦合，其中两个在第一电极之上彼此耦合。 版权所有（C）2004，JPO

公开(公告)号：JP2002158112A

公开(公告)日：2002-05-31

申请号：JP2001276880

申请日：2001-09-12

Applicant: MEMSCAP

Inventor： FEDELI JEAN-MARC

IPC: H01F10/12 ,  H01F10/32 ,  H01F17/00 ,  H01F17/04

Abstract: PROBLEM TO BE SOLVED: To provide a minute element for increasing the maximum operating frequency. SOLUTION: The minute element such as a minute inductor (1) comprises metal coil winding (2) in the form of a solenoid, and a magnetic core (4) having a strip (12) formed by a ferromagnetic material. The magnetic core (4) has an additional strip (13) made of the ferromagnetic material. The strip (13) is separated from other strips by a spacer material (14) made of a nonmagnetic material. Also, the thickness of the spacer material is set to the thickness for antiferromagnetically connecting both the strips (12, 13).