公开(公告)号：EP3203494A4

公开(公告)日：2018-06-06

申请号：EP15843731

申请日：2015-09-17

Applicant: NAT INSTITUTE FOR MATERIALS SCIENCE

Inventor： SEKIGUCHI TAKASHI ,  IWAI HIDEO

IPC: H01J37/28 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: When an electrode (29) such as a grid applied with a negative voltage is installed in front of an objective lens (23), low energy electrons among secondary electrons (25) generated from a sample (24) by an electron beam or the like is reflected by the electrode to come into a detector (22) installed in the sample (24) side, while electrons of higher energy are not detected, since they are not reflected by the electrode. Accordingly, since only the electrons of lower energy of the secondary electrons can be detected by discriminating the secondary electrons by the energy, it is possible to obtain a detection signal, e.g., rich in the information on the surface state of the sample.