公开(公告)号：WO2009114112A3

公开(公告)日：2009-12-10

申请号：PCT/US2009001480

申请日：2009-03-06

Applicant: OMNIPROBE INC ,  KRUGER ROCKY ,  SMITH AARON ,  MOORE THOMAS

Inventor： KRUGER ROCKY ,  SMITH AARON ,  MOORE THOMAS

IPC: C23C16/455 ,  C23C16/48

CPC classification number: C23C16/4481 ,  C23C16/45561 ,  C23C16/48 ,  C23C16/52 ,  C23C16/54

Abstract: A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.

Abstract translation: 用于具有真空室的辐射束仪器的前驱体输送系统包括用于将气体喷射到仪器的真空室中的喷射管（340）和具有入口（295）和出口335的主气体管线（290）。 出口（335）连接到注入管（340），并且入口（295）连接到连接到载气源（150）的顺序的一对阀（120,125）。 用于容纳前体材料的坩埚（190）在一对阀（120,125）和注入管（340）之间的位置选择性地连接到主气体管线（290）。 载气源（150）可以通过一对载气阀（120,125）的顺序操作而选择性地连接到入口（295），使得载气脉冲辅助前体材料流到注入管 （340）。 通过选择性地将主管线（290）连接到与仪器真空连通的封套（300）的阀（110）实现前体之间系统的快速清洗。 还公开了使用该系统的CVD和蚀刻方法。

公开(公告)号：EP2872669A4

公开(公告)日：2016-03-23

申请号：EP13817088

申请日：2013-04-15

Applicant: OMNIPROBE INC

Inventor： KRUGER ROCKY ,  SMITH AARON ,  HARTFIELD CHERYL

IPC: H01J37/02 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

公开(公告)号：WO2014011292A8

公开(公告)日：2015-02-26

申请号：PCT/US2013036554

申请日：2013-04-15

Applicant: OMNIPROBE INC

Inventor： KRUGER ROCKY ,  SMITH AARON ,  HARTFIELD CHERYL

IPC: C23C16/455 ,  C23C16/44

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time, An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。储存器的出口通过出口阀联接到输出通道， 配置成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。