公开(公告)号：WO2002084374A1

公开(公告)日：2002-10-24

申请号：PCT/US2001/048079

申请日：2001-12-13

Applicant: ONIX MICROSYSTEMS

Inventor： BEHIN, Behrang ,  DANEMAN, Michael ,  LIN, Chuang-Chia ,  KOBRIN, Boris ,  CHAPARALA, Murali ,  ZALEWSKI, Gary

IPC: G02B26/08

CPC classification number: G02B6/358 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0841 ,  G02B2006/12104

Abstract: A microelectromechanical (MEMS) apparatus has a base (206) and a flap (211) with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity (215) with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position. Electrodes (216) may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. An array of one or more of such structures may be used to form an optical switch. The apparatus may be made by a process involving etching one or more trenches in a backside of a base. The trench may be etched such that a crystal orientation of the base material defines an orientation of a sidewall.

Abstract translation: 微机电（MEMS）装置具有基部（206）和翼片（211），其中部分联接到基部，使得翼片可以在第一和第二位置之间移动离开基部的平面。 基部可以具有空腔（215），其具有大的垂直侧壁，当瓣片处于第二位置时，该侧壁接触翼片的一部分。 电极（216）可以放置在垂直侧壁上并与基底电隔离以提供瓣片向侧壁的静电夹持。 可以使用一个或多个这样的结构的阵列来形成光学开关。 该设备可以通过涉及蚀刻底座背面中的一个或多个沟槽的工艺来制造。 可以蚀刻沟槽，使得基底材料的晶体取向限定侧壁的取向。

公开(公告)号：WO2003010878A2

公开(公告)日：2003-02-06

申请号：PCT/US2002/023672

申请日：2002-07-23

Applicant: ONIX MICROSYSTEMS

Inventor： LIN, Chuang-Chia

IPC: H02N

CPC classification number: G02B6/3584 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/053 ,  B81C1/00214 ,  G02B6/3502 ,  G02B6/352 ,  G02B6/3526 ,  G02B6/3528 ,  G02B6/3534

Abstract: Microelectromechanical systems (MEMS) elements, optical switches and fabrication methods are described. A MEMS element comprises a crystalline moveable element moveably attached to a substrate for motion substantially perpendicular to a plane of the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to the substrate. In at least one position, a part of the perpendicular portion projects beyond a surface of the substrate. The perpendicular portion and substrate have substantially similar crystal structures. The perpendicular portion may be formed from the substrate. An array of such structures can implement an optical switch. MEMS elements may be fabricated by forming one or more trenches in a substrate to define a perpendicular portion; attaching a moveable element to a first surface of the substrate; and removing a portion of the substrate such that at least a part of the perpendicular portion projects beyond a second surface.

Abstract translation: 描述了微机电系统（MEMS）元件，光开关和制造方法。 MEMS元件包括可移动地附接到基板的结晶可移动元件，用于基本上垂直于基板的平面的运动。 可移动元件包括垂直于基本垂直于基底的垂直部分。 在至少一个位置，垂直部分的一部分突出超过基板的表面。 垂直部分和基底具有基本相似的晶体结构。 垂直部分可以由基底形成。 这种结构的阵列可以实现光学开关。 可以通过在衬底中形成一个或多个沟槽来限定垂直部分来制造MEMS元件; 将可移动元件附接到所述基板的第一表面; 以及去除所述基底的一部分，使得所述垂直部分的至少一部分突出超过第二表面。

公开(公告)号：WO2003010878A3

公开(公告)日：2003-02-06

申请号：PCT/US2002/023672

申请日：2002-07-23

Applicant: ONIX MICROSYSTEMS

Inventor： LIN, Chuang-Chia

IPC: G02B6/35

Abstract: Microelectromechanical systems (MEMS) elements, optical switches and fabrication methods are described. A MEMS element (101) comprises a crystalline moveable element moveably attached to a substrate for motion substantially perpendicular to a plane of the substrate. The moveable element includes a perpendicular portion (104) oriented substantially perpendicular to the substrate. In at least one position, a part of the perpendicular portion projects beyond a surface of the substrate. The perpendicular portion and substrate have substantially similar crystal structures. The perpendicular portion may be formed from the substrate. An array of such structures can implement an optical switch. MEMS elements may be fabricated by forming one or more trenches in a substrate to define a perpendicular portion; attaching a moveable element to a first surface of the substrate; and removing a portion of the substrate such that at least a part of the perpendicular portion projects beyond a second surface.