公开(公告)号：WO2002086583A1

公开(公告)日：2002-10-31

申请号：PCT/US2002/008120

申请日：2002-03-15

Applicant: ONIX MICROSYSTEMS ,  BEHIN, Behrang ,  CHAPARALA, Murali ,  CONANT, Robert ,  DANEMAN, Michael ,  HORSLEY, David ,  KIANG, Meng-Hsiung ,  LERNER, David ,  PANNU, Satinderpall ,  WYCZALKOWSKI, Matthew ,  ZALEWSKI, Gary

Inventor： BEHIN, Behrang ,  CHAPARALA, Murali ,  CONANT, Robert ,  DANEMAN, Michael ,  HORSLEY, David ,  KIANG, Meng-Hsiung ,  LERNER, David ,  PANNU, Satinderpall ,  WYCZALKOWSKI, Matthew ,  ZALEWSKI, Gary

IPC: G02B26/00

CPC classification number: G02B6/3556 ,  G02B6/3512 ,  G02B6/3588

Abstract: A beam steering module (2302) comprised of a mirror stack array (2304, 2308) in close proximity to a collimator array (2306) controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single (900) and double (800) axis mirror rotation and relay optics (120, 216,226). Optical telecommunications switches (2300) are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror (2310) and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.

Abstract translation: 由靠近准直器阵列（2306）的反射镜阵列（2304,2308）组成的光束转向模块（2302）可控制地沿着两个轴线并且沿着与准直器取向基本上小于90度的方向导引光子。 使用单（900）和双（800）轴反射镜旋转和中继光学器件（120,216,226）描述了该模块的几种配置。 光通信开关（2300）被示出为使用具有和不使用折叠镜（2310）的平面和弯曲表面彼此耦合的模块，并且实现了多个配置选项，包括不需要外部电源抽头的光电检测器光功率监控方案。

公开(公告)号：WO2002084374A1

公开(公告)日：2002-10-24

申请号：PCT/US2001/048079

申请日：2001-12-13

Applicant: ONIX MICROSYSTEMS

Inventor： BEHIN, Behrang ,  DANEMAN, Michael ,  LIN, Chuang-Chia ,  KOBRIN, Boris ,  CHAPARALA, Murali ,  ZALEWSKI, Gary

IPC: G02B26/08

CPC classification number: G02B6/358 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0841 ,  G02B2006/12104

Abstract: A microelectromechanical (MEMS) apparatus has a base (206) and a flap (211) with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity (215) with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position. Electrodes (216) may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. An array of one or more of such structures may be used to form an optical switch. The apparatus may be made by a process involving etching one or more trenches in a backside of a base. The trench may be etched such that a crystal orientation of the base material defines an orientation of a sidewall.

Abstract translation: 微机电（MEMS）装置具有基部（206）和翼片（211），其中部分联接到基部，使得翼片可以在第一和第二位置之间移动离开基部的平面。 基部可以具有空腔（215），其具有大的垂直侧壁，当瓣片处于第二位置时，该侧壁接触翼片的一部分。 电极（216）可以放置在垂直侧壁上并与基底电隔离以提供瓣片向侧壁的静电夹持。 可以使用一个或多个这样的结构的阵列来形成光学开关。 该设备可以通过涉及蚀刻底座背面中的一个或多个沟槽的工艺来制造。 可以蚀刻沟槽，使得基底材料的晶体取向限定侧壁的取向。

公开(公告)号：WO2001074707A3

公开(公告)日：2001-10-11

申请号：PCT/US2001/009261

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS, INC.

Inventor： BEHIN, Behrang ,  PANNU, Satinderpall, S.

IPC: B81B3/00

Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers (115) and a second comb structure having a plurality of second comb fingers (117), wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first (115) and second (117) comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

公开(公告)号：EP1224500A2

公开(公告)日：2002-07-24

申请号：EP01924116.5

申请日：2001-03-02

Applicant: Onix Microsystems Inc.

Inventor： KIANG, Meng-Hsiung ,  LAM, Kam, Y. ,  BEHIN, Behrang ,  DANEMAN, Michael, J.

IPC: G02B26/02

CPC classification number: G02B6/3546 ,  G02B6/3512 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582

Abstract: An optical switch module having a movable mirror (312) disposed between two fixed mirrors (310, 314). All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror (312) moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.

公开(公告)号：EP1273094A2

公开(公告)日：2003-01-08

申请号：EP01920721.6

申请日：2001-03-23

Applicant: Onix Microsystems Inc.

Inventor： BEHIN, Behrang ,  PANNU, Satinderpall, S.

IPC: H02N1/00 ,  B81B3/00 ,  B81B5/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers (14) and a second comb structure having a plurality of second comb fingers (24), wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage (15) between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axes.

公开(公告)号：EP1269619A2

公开(公告)日：2003-01-02

申请号：EP01924326.0

申请日：2001-03-22

Applicant: Onix Microsystems Inc.

Inventor： BEHIN, Behrang ,  LAM, Kam, Y. ,  KIANG, Meng-Hsiung ,  DANEMAN, Michael, J. ,  PANNU, Satinderpall S.

IPC: H02N1/00 ,  G02B26/00

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3556 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.