公开(公告)号：DE69033441D1

公开(公告)日：2000-03-02

申请号：DE69033441

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTHWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：DE69033441T2

公开(公告)日：2000-05-18

申请号：DE69033441

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTHWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：DE69027004T2

公开(公告)日：1996-11-14

申请号：DE69027004

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：AT138111T

公开(公告)日：1996-06-15

申请号：AT90312323

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：AT189272T

公开(公告)日：2000-02-15

申请号：AT95117528

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTHWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：CA1340651C

公开(公告)日：1999-07-13

申请号：CA590272

申请日：1989-02-07

Applicant: OPTICAL COATING LABORATORY INC

Inventor： AUSTIN R RUSSEL ,  SEESER JAMES W N ,  LEFEBVRE PAUL M ,  SEDDON RICHARD IAN ,  SCOBEY MICHAEL A ,  MANLEY BARRY W

IPC: C23C8/02 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/35 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58

Abstract: A rotary cylindrical sputtering system incorporates separate, separately-controlled linear magnetron sputter cathode and intense plasma reaction zones for sputter depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated cathode and reaction zones and is characterized by the ability to form a wide range of materials, by scaling and high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.

公开(公告)号：DE69027004D1

公开(公告)日：1996-06-20

申请号：DE69027004

申请日：1990-11-12

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIK R ,  HICHWA BRYANT P ,  ILLSLEY ROLF F ,  KLINGER ROBERT F ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTWORTH PATRICK R

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  C23C14/32

公开(公告)号：CA2029755A1

公开(公告)日：1991-05-14

申请号：CA2029755

申请日：1990-11-13

Applicant: OPTICAL COATING LABORATORY INC

Inventor： SEESER JAMES W ,  ALLEN THOMAS H ,  DICKEY ERIC R ,  HICHWA BRYANT P ,  TEMPLE MICHAEL D ,  VAN HORN CRAIG C ,  WENTWORTH PATRICK R ,  ILLSLEY ROLF F ,  KLINGER ROBERT E ,  LEFEBVRE PAUL M ,  SCOBEY MICHAEL A ,  SEDDON RICHARD I ,  SOBERANIS DAVID L

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  C23C14/58 ,  H01J37/34

公开(公告)号：CA2021367A1

公开(公告)日：1991-01-19

申请号：CA2021367

申请日：1990-07-17

Applicant: OPTICAL COATING LABORATORY INC

Inventor： LEFEBVRE PAUL M ,  SEESER JAMES W ,  SEDDON RICHARD I ,  SCOBEY MICHAEL A ,  MANLEY BARRY W

IPC: G02B1/10 ,  C23C8/02 ,  C23C14/00 ,  C23C14/08 ,  C23C14/34 ,  C23C14/50 ,  C23C14/54 ,  C23C14/58 ,  C23C14/14 ,  B05D3/10 ,  B05D5/06

Abstract: A rotary cylindrical sputtering system incorporates separate, separately-controlled linear magnetron sputter deposition and reaction zones for sputter depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. In one aspect, the associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by the ability to form durable optical quality thin films of nominal refractive indices and controlled coating thickness, including both constant and selectively varied thickness profiles.

公开(公告)号：EP0907505A4

公开(公告)日：2000-05-24

申请号：EP97904891

申请日：1997-01-28

Applicant: OPTICAL COATING LABORATORY INC

Inventor： ADAIR ROBERT W ,  LEFEBVRE PAUL M ,  KURMAN ERIC W

IPC: B32B9/00 ,  B32B17/06 ,  C03C17/34 ,  C03C17/42 ,  G02B1/11 ,  B32B7/02 ,  B32B15/00 ,  G02B5/08

CPC classification number: B32B17/06 ,  C03C17/3435 ,  C03C17/3452 ,  C03C17/42 ,  C03C2217/734 ,  G02B1/116 ,  Y10T428/24975

Abstract: The present invention relates to electrically-conductive, absorbing, contrast-enhancing antireflection coatings having excellent optical properties characterized by, specifically, a large bandwidth ratio, i.e., a ratio indicative of the range of wavelengths for which the reflectance value is less than 0.6%, and a small brightness value for the visible wavelengths. It has been surprisingly discovered that a simple, two-layer substrate coating consisting of only a first thin layer of a transparent material having a low refractive index and a second very thin layer of an absorbing, electrically conductive, transition metal oxynitride material provides high performance, electrically conductive, contrast-enhancing antireflection coatings having small brightness values and large bandwidth ratios. The present invention provides antireflection coatings having brightness values less than or equal to about 0.22, and preferably less than or equal to about 0.15. One important advantage of the present invention is that, due to the simplicity of the design and the suitability and efficiency of deposition of the materials in an in-line DC reactive magnetron sputtering process, the high performance, absorbing, electrically conductive, and contrast-enhancing antireflection coatings in accord with the present invention can be produced in a very cost-effective manner.