公开(公告)号：US20210102892A1

公开(公告)日：2021-04-08

申请号：US17064212

申请日：2020-10-06

Applicant: Orbotech Ltd.

Inventor： Ram Oron ,  Hanina Golan ,  Ilia Lutsker ,  Gil Tidhar

IPC: G01N21/45 ,  G03H1/04 ,  G03H1/00

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.

公开(公告)号：US11313794B2

公开(公告)日：2022-04-26

申请号：US17064212

申请日：2020-10-06

Applicant: Orbotech Ltd.

Inventor： Ram Oron ,  Hanina Golan ,  Ilia Lutsker ,  Gil Tidhar

IPC: G03H1/00 ,  G01B11/24 ,  G01B11/25 ,  G01B9/023 ,  G01B9/02 ,  G01N21/45 ,  G03H1/04 ,  G03H1/08 ,  G01B9/02015

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.