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公开(公告)号:US20220012405A1
公开(公告)日:2022-01-13
申请号:US17288369
申请日:2019-10-02
Applicant: Orbotech Ltd.
Inventor: Ram Oron , Michael Burdinov , Elad Goshen , Ronald F. Kaminsky , Gonen Raveh
IPC: G06F30/3953 , G06F30/398 , G06F30/31
Abstract: A method includes, receiving a layout design of at least part of an electronic module, the design specifying at least (i) an electronic device coupled to at least a substrate, and (ii) an electrical trace that is connected to the electronic device and has a designed route. A digital input, which represents at least part of an actual electronic module that was manufactured in accordance with the layout design but without at least a portion of the electrical trace, is received. An error in coupling the electronic device to the substrate, relative to the layout design, is estimated based on the digital input. An actual route that corrects the estimated error, is calculated for at least the portion of the electrical trace. At least the portion of the electrical trace is formed on the substrate of the actual electronic module, along the actual route instead of the designed route.
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公开(公告)号:US20210102892A1
公开(公告)日:2021-04-08
申请号:US17064212
申请日:2020-10-06
Applicant: Orbotech Ltd.
Inventor: Ram Oron , Hanina Golan , Ilia Lutsker , Gil Tidhar
Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.
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公开(公告)号:US08888328B2
公开(公告)日:2014-11-18
申请号:US13712580
申请日:2012-12-12
Applicant: Orbotech Ltd.
Inventor: Ben-Zion Lavi , Ram Oron , Uri Gold , Ilia Lutsker , Mordechay Silberberg
IPC: F21V29/00
CPC classification number: H01L33/64 , F21V29/70 , H05K1/0207 , H05K1/0306 , H05K2201/10106
Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.
Abstract translation: 一种基于LED的高功率均匀光引擎,其包括具有共同阳极的LED阵列和超过0.85的填充因子,具有热扩散功能的公共阳极和与公共阳极热连接的有源散热器。
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公开(公告)号:US11313794B2
公开(公告)日:2022-04-26
申请号:US17064212
申请日:2020-10-06
Applicant: Orbotech Ltd.
Inventor: Ram Oron , Hanina Golan , Ilia Lutsker , Gil Tidhar
IPC: G03H1/00 , G01B11/24 , G01B11/25 , G01B9/023 , G01B9/02 , G01N21/45 , G03H1/04 , G03H1/08 , G01B9/02015
Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.
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公开(公告)号:US09269149B2
公开(公告)日:2016-02-23
申请号:US14272745
申请日:2014-05-08
Applicant: Orbotech Ltd.
CPC classification number: G06T7/004 , G01N21/88 , G03F7/00 , G03F7/70383 , G03F7/70516 , G06T7/0004 , G06T7/521 , G06T7/80 , G06T2207/30164
Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.
Abstract translation: 光学装置包括保持工件的安装件。 光学头阵列将相应的辐射图案投影到工件上。 校准组件捕获相应图案的图像。 校准组件安装在其上的运动组件在光学头阵列与安装座之间的多个不同位置之间传送校准组件,以便在每个不同位置处截取和成像相应的图案投影 通过不同的一个光学头。 处理器处理由校准组件在不同位置拍摄的图像,以便监视设备的操作。
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公开(公告)号:US11652008B2
公开(公告)日:2023-05-16
申请号:US17288369
申请日:2019-10-02
Applicant: Orbotech Ltd.
Inventor: Ram Oron , Michael Burdinov , Elad Goshen , Ronald F. Kaminsky , Gonen Raveh
IPC: G06F30/3953 , G06F30/398 , G06F30/31 , G06F115/12
CPC classification number: G06F30/3953 , G06F30/31 , G06F30/398 , G06F2115/12
Abstract: A method includes, receiving a layout design of at least part of an electronic module, the design specifying at least (i) an electronic device coupled to at least a substrate, and (ii) an electrical trace that is connected to the electronic device and has a designed route. A digital input, which represents at least part of an actual electronic module that was manufactured in accordance with the layout design but without at least a portion of the electrical trace, is received. An error in coupling the electronic device to the substrate, relative to the layout design, is estimated based on the digital input. An actual route that corrects the estimated error, is calculated for at least the portion of the electrical trace. At least the portion of the electrical trace is formed on the substrate of the actual electronic module, along the actual route instead of the designed route.
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