公开(公告)号：EP2407812A4

公开(公告)日：2014-05-21

申请号：EP10766813

申请日：2010-04-16

Applicant: PANASONIC CORP

Inventor： NAKAZONO SHINSUKE ,  HIRAOKA SOICHIRO ,  TERADA JIROU ,  FURUKAWA SHIGEO ,  HORIE TOSHIAKI ,  KOMAKI KAZUKI ,  TADA MASAKI ,  YAMAMOTO YUTA

IPC: G02B26/08

CPC classification number: G02B26/0858

公开(公告)号：EP2270972A4

公开(公告)日：2014-05-14

申请号：EP09733905

申请日：2009-04-23

Applicant: PANASONIC CORP

Inventor： TERADA JIROU ,  NAKAZONO SHINSUKE ,  FURUKAWA SHINGEO ,  KOMAKI KAZUKI

IPC: H01L41/09 ,  G02B26/08 ,  H02N2/10

CPC classification number: H01L41/0953 ,  G02B26/0858

公开(公告)号：EP2352050A4

公开(公告)日：2014-01-29

申请号：EP09827346

申请日：2009-11-18

Applicant: PANASONIC CORP

Inventor： HIRAOKA SOICHIRO ,  TERADA JIROU ,  NAKAZONO SHINSUKE ,  FURUKAWA SHIGEO

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G02B26/101

Abstract: An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.

公开(公告)号：EP2063224A4

公开(公告)日：2012-05-09

申请号：EP07792064

申请日：2007-08-07

Applicant: PANASONIC CORP

Inventor： TERADA JIROU

IPC: G01C19/56 ,  H01L41/08 ,  H01L41/187

CPC classification number: G01C19/5726 ,  G01C19/574 ,  H01L41/08