Abstract:
An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
Abstract:
A method of controlling a spectroscopic module that includes a measurement light source, a variable-wavelength optical filter, a photodiode, and a conversion circuit for converting a drive signal voltage into a gap displacement amount. The spectroscopic module has a reference light source for emitting a reference light beam of a known wavelength. The controlling method involves varying a gap for the incident reference light beam, extracting two maximum points among data output from the photodiode, and updating a first conversion formula provided in the conversion circuit through use of drive signal voltages and gap amounts corresponding to the two points.
Abstract:
PROBLEM TO BE SOLVED: To provide an optical reflection element capable of projecting clear images by reducing undesirable vibration induced on actuators for scanning a light beam along two axes.SOLUTION: An optical reflection element of the present invention includes: a first frame member 22; a pair of first vibrating members 23, each having one end supported at an opposing point on the inner side of the first frame member 22; a second frame member 25 which is supported at the other ends of the first vibrating members 23 using connectors 24; a pair of second vibrating members 26, each having one end supported at an opposing point on the inner side of the second frame member 25 in a direction substantially perpendicular to a vibration axis of the first vibration members 23; and a mirror member supported by the other ends of the second vibrating members 26. The connectors 24 have resin layers.
Abstract:
PROBLEM TO BE SOLVED: To provide a highly reliable actuator with respect to repetitive stress.SOLUTION: The actuator includes: a movable part 9 with wiring 14; and a driving part 12 for driving the movable part 9 by torsional motion or bending motion, or both of these motions. The wiring 14 is formed of conducting organic polymer. Thus, a lower electrode, an upper electrode, and wiring disposed in the movable part 9 subjected to repetitive stress are formed of the conducting organic polymer instead of metal. This eliminates the probability of migration, and also enhances the flexibility of the movable part, thereby providing a highly reliable actuator.
Abstract:
PROBLEM TO BE SOLVED: To provide an optical reflection element unit in which the airtightness of a package of an optical reflection element is improved. SOLUTION: The optical reflection element unit is provided with: the optical reflection element 5 having a mirror part 6 and drive parts 7, 9 for vibrating the mirror part 6; the package 12 which includes the optical reflection element 5 and has an opening 20 above the mirror part 6; and a light transmissive part 13 which covers the opening 20 of the package 12 and has a curved shape having the convex upper side. The package 12 has a projection part 21 projecting from the periphery of the opening 20 into the upper part of the package 12. The light transmissive part 13 is disposed on the outside of the projection part 21 and a sealing material 23 is inserted into the space between the light transmissive part 13 and the projection part 21. As a result, the joining strength of the light transmissive part 13 to the package 12 can be increased and consequently the airtightness of the package 12 can be improved. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To solve the problem that, as conventionally a micropipette is attached to an electrode holder with a screw and an O ring to ensure airtightness, such a method makes the work complicated and reduces the measurement efficiency. SOLUTION: The microprobe includes: a micropipette 10; a socket 7 having a first opening part 8 and a second opening part 9; a measuring electrode 4; a sleeve 2; and a connection member 3 provided with a pressure connection port 5, wherein, the back end of the micropipette 10 is inserted into the first opening part 8 of the socket 7, and the sleeve 2 is inserted into the second opening part 9 of this socket 7. COPYRIGHT: (C)2009,JPO&INPIT