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公开(公告)号:BRPI0812098B1
公开(公告)日:2018-06-19
申请号:BRPI0812098
申请日:2008-05-28
Applicant: PYREOS LTD
Inventor: GIEBELER CARSTEN , SCHREITER MATTHIAS , ZAPF JÖRG
IPC: G01J5/10 , G01J5/34 , H01L27/16 , H01L31/0203
公开(公告)号:BRPI0812098B1
公开(公告)日:2018-06-19
申请号:BRPI0812098
申请日:2008-05-28
Applicant: PYREOS LTD
Inventor: GIEBELER CARSTEN , SCHREITER MATTHIAS , ZAPF JÖRG
IPC: G01J5/10 , G01J5/34 , H01L27/16 , H01L31/0203