公开(公告)号：DE102007024903A1

公开(公告)日：2008-12-11

申请号：DE102007024903

申请日：2007-05-29

Applicant: PYREOS LTD

Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JOERG

IPC: H01L37/00 ,  B81C3/00 ,  G01J1/02 ,  G01J5/10 ,  G01J5/34

Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

公开(公告)号：BRPI0812098A2

公开(公告)日：2014-11-25

申请号：BRPI0812098

申请日：2008-05-28

Applicant: PYREOS LTD

Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JOERG

IPC: G01J5/34 ,  G01J5/10 ,  H01L27/16 ,  H01L31/0203

Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

公开(公告)号：DE102007024903B4

公开(公告)日：2009-05-07

申请号：DE102007024903

申请日：2007-05-29

Applicant: PYREOS LTD

Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JOERG

IPC: H01L37/00 ,  G01J5/02 ,  G01J5/12 ,  G01J5/34

Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.