公开(公告)号：DE2319041A1

公开(公告)日：1973-11-08

申请号：DE2319041

申请日：1973-04-14

Applicant: RCA CORP

Inventor： MEHALSO ROBERT MICHAEL ,  HARRIS DAVID ISAAC

IPC: G11B3/70 ,  G03F7/16 ,  G11B7/26 ,  G11B11/12

Abstract: 1413246 Coated products R C A CORPORATION 13 April 1973 [19 April 1972] 17796/73 Heading B2E [Also in Division G5] Method of coating a record disc having a spiral groove which may not be of uniform depth and cross sectional radius over its length with a photo-resist such that the coated groove has a more uniform depth and radius comprises the steps of applying an excess of photo resist solution having a viscosity of 0.1-200 cps to the grooved surface when the disc is rotating at 100-2000 r.p.m. for a period of about 1 minute to drive off the excess and then reducing the speed to 2-10 r.p.m. until the coating has dried. In a specific example the photo resist solution contains 19.5% by weight of solids, has a viscosity of 4.5-4.6 cps and a specific gravity of 1.0 to 1.01.

公开(公告)号：DE2539690A1

公开(公告)日：1976-03-25

申请号：DE2539690

申请日：1975-09-06

Applicant: RCA CORP

Inventor： HARRIS DAVID ISAAC ,  JOHNSTON LOREN BAINUM

IPC: G03F7/039 ,  G03F7/022 ,  G03F7/30 ,  G03F7/02

Abstract: The effective sensitivity of a photo- or electron beam resist is improved by contacting the resist film with developer solution and water prior to exposure.