公开(公告)号：WO9813605A3

公开(公告)日：1998-07-09

申请号：PCT/US9716921

申请日：1997-09-25

Applicant: REDWOOD MICROSYSTEMS INC

Inventor： HARRIS JAMES M ,  COZAD BRADFORD A ,  HOPKINS DEAN ALLYN JR ,  FITCH JOHN S

IPC: B81B3/00 ,  F15C3/04 ,  F15C5/00 ,  F16K31/02 ,  F16K99/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0069 ,  F16K2099/0074 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0082 ,  F16K2099/0086

Abstract: Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device (120) having a sealed cavity (100) with a flexible wall (200). The sealed cavity (100) contains a fluid (130) that expands and contracts as it is heated or cooled, thus causing the flexible wall (200) to move. Movement of this wall (200) or membrane is used to move a valve element (300) and dynamically control the opening or closing of a valve port (400) over a predetermined range.

公开(公告)号：WO2005033561A3

公开(公告)日：2005-10-27

申请号：PCT/US2004032108

申请日：2004-09-29

Applicant: REDWOOD MICROSYSTEMS INC

Inventor： HENNING ALBERT K ,  SELSER MICHAEL ,  COZAD BRADFORD A

IPC: F15C5/00 ,  F16K20060101 ,  F16K1/42 ,  F16K11/04 ,  F16K99/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0015 ,  F16K99/0028 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0059 ,  F16K2099/0076 ,  Y10T137/86718 ,  Y10T137/86734

Abstract: A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.

Abstract translation: 描述了用于在具有小致动距离的阀中实现高流量的方法。 提供硅微型阀的详细描述。 描述了用于设计优化阀的算法。

公开(公告)号：AU4588097A

公开(公告)日：1998-04-17

申请号：AU4588097

申请日：1997-09-25

Applicant: REDWOOD MICROSYSTEMS INC

Inventor： HARRIS JAMES M ,  COZAD BRADFORD A ,  HOPKINS DEAN ALLYN JR ,  FITCH JOHN S

IPC: B81B3/00 ,  F15C3/04 ,  F15C5/00 ,  F16K31/02 ,  F16K99/00

Abstract: A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.