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    FLUID DELIVERY SYSTEM AND MOUNTING PANEL THEREFOR
    1.
    发明申请
    FLUID DELIVERY SYSTEM AND MOUNTING PANEL THEREFOR 审中-公开
    流体输送系统及其安装面板

    公开(公告)号：WO2004079785A3

    公开(公告)日：2005-02-24

    申请号：PCT/US2004006148

    申请日：2004-03-02

    Applicant: REDWOOD MICROSYSTEMS INC ,  HARRIS JAMES M ,  SELSER MICHAEL J

    Inventor： HARRIS JAMES M ,  SELSER MICHAEL J

    IPC: F15B13/08 ,  F16K27/00 ,  E03B1/00

    CPC classification number: F15B13/081 ,  F15B13/0814 ,  F15B13/0857 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F16K27/003 ,  Y10T137/87885

    Abstract: A novel fluid delivery system includes a mounting panel, where the mounting panel includes channels that define the flow of fluid between any flow-control components mounted on the mounting panel. The mounting panel comprises a top plate and a bottom plate, and the channels are carved out of the underside of the top plate and are enclosed by the bottom plate. In a complex fluid delivery system having many fluid channels, the mounting panel may include one or more interior panels with additional channels carved out of the interior plates to accommodate all routing paths. The channels run in two or more directions to connect two or more gas/channel sticks together.

    Abstract translation: 新颖的流体输送系统包括安装面板，其中安装面板包括在安装在安装面板上的任何流量控制组件之间限定流体流动的通道。 安装面板包括顶板和底板，并且通道被雕刻在顶板的下侧之外并被底板包围。 在具有许多流体通道的复杂流体输送系统中，安装面板可以包括一个或多个内部面板，其具有从内部板中雕刻出的附加通道，以适应所有的路线路径。 通道在两个或更多个方向上运行，以将两个或多个气体/通道棒连接在一起。

    METHOD FOR PRODUCING AND TESTING A CORROSION-RESISTANT CHANNEL IN A SILICON DEVICE
    3.
    发明申请
    METHOD FOR PRODUCING AND TESTING A CORROSION-RESISTANT CHANNEL IN A SILICON DEVICE 审中-公开
    在硅器件中生产和测试耐腐蚀通道的方法

    公开(公告)号：WO2004047148A2

    公开(公告)日：2004-06-03

    申请号：PCT/US0336669

    申请日：2003-11-17

    Applicant: REDWOOD MICROSYSTEMS INC

    Inventor： HARRIS JAMES M ,  PATEL SAPNA

    IPC: B81B7/00 ,  B81C99/00 ,  F16K99/00 ,  H01L21/02 ,  H01L21/66 ,  H01L23/544 ,  H01L

    CPC classification number: H01L22/20 ,  B81B7/0012 ,  B81B2201/054 ,  B81B2201/058 ,  B81C99/0045 ,  B81C2203/038 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0059 ,  F16K2099/0074 ,  H01L21/02071 ,  H01L22/24 ,  H01L22/34

    Abstract: A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like CIF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.

    Abstract translation: 在硅装置的润湿路径中制造耐腐蚀通道的方法使得这种装置能够与诸如氟的腐蚀性化合物一起使用。 MEMS器件的润湿路径涂覆有（1）抗原子氟侵蚀的有机化合物或（2）能够被原子氟钝化的材料。 然后将该装置暴露于当通过等离子体放电激活时分解成活性氟化合物的气体。 这种气体的一个例子是CF4，惰性气体比诸如CIF3的挥发性气体更容易和更安全地工作。 气体将钝化材料（如果适用）并腐蚀任何暴露的硅。 该装置以这样的方式被测试，使得湿润路径的任何不可接受的腐蚀将导致装置失效。 如果设备正常工作，则湿润路径被认为是耐氟或其他腐蚀性化合物的腐蚀，如适用的。

    APPARATUS AND METHOD FOR CORRECTING SENSOR DRIFT
    4.
    发明公开
    APPARATUS AND METHOD FOR CORRECTING SENSOR DRIFT 有权
    DEVICE AND METHOD FOR漂移校正传感器

    公开(公告)号：EP1163492A4

    公开(公告)日：2004-09-22

    申请号：EP00910193

    申请日：2000-02-15

    Applicant: REDWOOD MICROSYSTEMS INC

    Inventor： HARRIS JAMES M ,  TAHERI BABAK ,  ARKILIC ERROL

    IPC: G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G01L27/00

    CPC classification number: G01L27/005 ,  G01D3/022 ,  G01D18/008 ,  G01L9/065

    Abstract: A sensor drift correction apparatus (20) includes a sensor package (22) which includes a fluid conduit (24), a proportional controller (26), a temperature sensor (28), a first pressure sensor (30), an integral controller (32) and a second pressure sensor (34). Bus (36) connects first pressure sensor (30), etc. to a micro-controller (38) having an associated internal or external memory (40). Included in memory (40) are an initial parameter specification module (42), a standard mode control module (44), a calibration condition identification module (46), a sensor drift calculation module (48) and a sensor drift adjustment mode operation module (50) which together act to identify a calibration command, identify a nominal zero pressure drift correction factor for sensor (30, 34) by relying upon a calibration voltage value and a calibration temperature value secured at nominal zero pressure condition, and subsequently adjusting sensor output accordingly.

    Integrated electrically operable micro-valve
    9.
    发明专利
    Integrated electrically operable micro-valve 未知

    公开(公告)号：AU4588097A

    公开(公告)日：1998-04-17

    申请号：AU4588097

    申请日：1997-09-25

    Applicant: REDWOOD MICROSYSTEMS INC

    Inventor： HARRIS JAMES M ,  COZAD BRADFORD A ,  HOPKINS DEAN ALLYN JR ,  FITCH JOHN S

    IPC: B81B3/00 ,  F15C3/04 ,  F15C5/00 ,  F16K31/02 ,  F16K99/00

    Abstract: A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.

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