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公开(公告)号：WO2004079785A3
公开(公告)日：2005-02-24
申请号：PCT/US2004006148
申请日：2004-03-02
Applicant: REDWOOD MICROSYSTEMS INC , HARRIS JAMES M , SELSER MICHAEL J
Inventor： HARRIS JAMES M , SELSER MICHAEL J
CPC classification number: F15B13/081 , F15B13/0814 , F15B13/0857 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F16K27/003 , Y10T137/87885
Abstract: A novel fluid delivery system includes a mounting panel, where the mounting panel includes channels that define the flow of fluid between any flow-control components mounted on the mounting panel. The mounting panel comprises a top plate and a bottom plate, and the channels are carved out of the underside of the top plate and are enclosed by the bottom plate. In a complex fluid delivery system having many fluid channels, the mounting panel may include one or more interior panels with additional channels carved out of the interior plates to accommodate all routing paths. The channels run in two or more directions to connect two or more gas/channel sticks together.
Abstract translation: 新颖的流体输送系统包括安装面板，其中安装面板包括在安装在安装面板上的任何流量控制组件之间限定流体流动的通道。 安装面板包括顶板和底板，并且通道被雕刻在顶板的下侧之外并被底板包围。 在具有许多流体通道的复杂流体输送系统中，安装面板可以包括一个或多个内部面板，其具有从内部板中雕刻出的附加通道，以适应所有的路线路径。 通道在两个或更多个方向上运行，以将两个或多个气体/通道棒连接在一起。
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Patent Agency Ranking
公开(公告)号：CA2400025A1
公开(公告)日：2001-08-23
申请号：CA2400025
申请日：2001-02-12
Applicant: REDWOOD MICROSYSTEMS INC
Inventor： WEBER WALTER A , HARRIS JAMES M , SELSER MICHAEL J
Abstract: A method of attaching a micromechanical fluid control device (62) to a substrate (64) includes the steps of forming a first ring of a first adhesiv e (70) around an aperture (66) defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between t he micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive (72) is applied arou nd the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
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公开(公告)号：AU5926200A
公开(公告)日：2001-01-30
申请号：AU5926200
申请日：2000-07-10
Applicant: REDWOOD MICROSYSTEMS INC
Inventor： SELSER MICHAEL J , ARKILIC ERROL B , TAHERI BABAK A
Abstract: An apparatus for mounting micromechanical fluid control components includes a manifold interface plate adaptable for connection to a manifold substrate oriented in a horizontal plane. The manifold interface plate receives mounting stress forces from the manifold substrate along the horizontal plane. An orthogonal component plate is connected to the manifold interface plate in a vertical plane with respect to the horizontal plane of the manifold substrate. The orthogonal component plate includes an orthogonal mounting surface with a micromechanical fluid control component mounted on it. The position of the micromechanical fluid control component on the orthogonal mounting surface substantially isolates the micromechanical fluid control component from the mounting stress forces.
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公开(公告)号：AU3686301A
公开(公告)日：2001-08-27
申请号：AU3686301
申请日：2001-02-12
Applicant: REDWOOD MICROSYSTEMS INC
Inventor： HARRIS JAMES M , SELSER MICHAEL J , WEBER WALTER A
Abstract: A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
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公开(公告)号：CA2400025C
公开(公告)日：2009-01-06
申请号：CA2400025
申请日：2001-02-12
Applicant: REDWOOD MICROSYSTEMS INC
Inventor： HARRIS JAMES M , SELSER MICHAEL J , WEBER WALTER A
Abstract: A method of attaching a micromechanical fluid control device (62) to a substrate (64) includes the steps of forming a first ring of a first adhesive (70) around an aperture (66) defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive (72) is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
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6.发明公开METHOD FOR ATTACHING A MICROMECHANICAL DEVICE TO A MANIFOLD, AND FLUID CONTROL SYSTEM PRODUCED THEREBY 有权用于保护设备AT A MIKROMESCHANISCHEN分配信道，然后方法GOT液体分配
公开(公告)号：EP1255642A4
公开(公告)日：2003-03-19
申请号：EP01909072
申请日：2001-02-12
Applicant: REDWOOD MICROSYSTEMS INC
Inventor： HARRIS JAMES M , SELSER MICHAEL J , WEBER WALTER A
CPC classification number: B81B7/0041 , B81C2203/019 , C09J5/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0036 , Y10T137/0402 , Y10T137/87676 , Y10T137/87885
Abstract: A method of attaching a micromechanical fluid control device (62) to a substrate (64) includes the steps of forming a first ring of a first adhesive (70) around an aperture (66) defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive (72) is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
Abstract translation: 微机械的流体控制装置附连到基板的方法，包括在微机械的流体控制装置和基板之间限定的孔周围形成第一粘合剂的第一环的步骤。 第一粘合剂形成微机械流体控制装置和所述基板之间的第一接口做是干净的，耐腐蚀的。 第二粘合剂的第二环在所述第一环围绕的应用。 第二粘合剂形成微机械流体控制装置之间的第二界面和基片做是气密性的。
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