公开(公告)号：EP1817542A4

公开(公告)日：2009-11-18

申请号：EP04794682

申请日：2004-10-07

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： LEARY SEAN P ,  TAS GURAY ,  MORATH CHRISTOPHER J ,  KOTELYANSKII MICHAEL ,  ZHENG TONG ,  LAZAROV GUENADIY ,  MILLER ANDRE D ,  ANTONELLI GEORGE A ,  LUDKE JAMIE L

IPC: G01B9/02

CPC classification number: G01N21/211 ,  G01N21/8422

公开(公告)号：WO2006132998A2

公开(公告)日：2006-12-14

申请号：PCT/US2006021531

申请日：2006-06-02

Applicant: RUDOLPH TECHNOLOGIES INC ,  LAZAROV GUENADIY ,  ZHENG LAURA ,  PINSKIY ALEKSANDR

Inventor： LAZAROV GUENADIY ,  ZHENG LAURA ,  PINSKIY ALEKSANDR

IPC: G06F17/50

CPC classification number: G01N21/9501 ,  H01L21/67288

Abstract: A semiconductor wafer measuring device including a wafer mover adapted to move a semiconductor wafer; a measurement head adapted to scan a surface of the semiconductor wafer as the semiconductor wafer is moved by the wafer mover; and a controller. The controller is adapted to control movement of the wafer mover to provide a first scanning segment of a first portion of the surface of the semiconductor wafer without rotating the semiconductor wafer during the first scanning segment, a second scanning segment of a second different portion of the surface of the semiconductor wafer without rotating the semiconductor wafer during the second scanning segment; and rotating the semiconductor wafer between the first and second scanning segments.

Abstract translation: 一种半导体晶片测量装置，包括适于移动半导体晶片的晶片移动器; 测量头，其适于在晶片移动器移动半导体晶片时扫描半导体晶片的表面; 和控制器。 控制器适于控制晶片移动器的运动，以在半导体晶片的表面的第一部分提供第一扫描段，而不在第一扫描段期间旋转半导体晶片，第二扫描段的第二不同部分 在第二扫描段期间不使半导体晶片旋转的半导体晶片的表面; 以及在第一和第二扫描段之间旋转半导体晶片。