公开(公告)号：SG11201507587QA

公开(公告)日：2015-10-29

申请号：SG11201507587Q

申请日：2014-02-05

Applicant: RUDOLPH TECHNOLOGIES INC ,  UNIV COLORADO REGENTS

Inventor： MURRAY TODD ,  MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MAIR ROBIN ,  MUKUNDHAN PRIYA ,  MURRAY TODD ,  MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MAIR ROBIN ,  MUKUNDHAN PRIYA

IPC: H01L21/66

公开(公告)号：SG192203A1

公开(公告)日：2013-09-30

申请号：SG2013057682

申请日：2012-01-27

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MUKUNDHAN PRIYA ,  COLGAN MICHAEL ,  ZHOU WEI

Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.

公开(公告)号：EP1817542A4

公开(公告)日：2009-11-18

申请号：EP04794682

申请日：2004-10-07

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： LEARY SEAN P ,  TAS GURAY ,  MORATH CHRISTOPHER J ,  KOTELYANSKII MICHAEL ,  ZHENG TONG ,  LAZAROV GUENADIY ,  MILLER ANDRE D ,  ANTONELLI GEORGE A ,  LUDKE JAMIE L

IPC: G01B9/02

CPC classification number: G01N21/211 ,  G01N21/8422

公开(公告)号：WO2006124475A2

公开(公告)日：2006-11-23

申请号：PCT/US2006018148

申请日：2006-05-10

Applicant: RUDOLPH TECHNOLOGIES INC ,  KOTELYANSKII MICHAEL ,  VERTIKOV ANDREY P ,  MORATH CHRISTOPHER J

Inventor： KOTELYANSKII MICHAEL ,  VERTIKOV ANDREY P ,  MORATH CHRISTOPHER J

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: A system comprising a means for generating an optical pump beam pulse and for directing the optical pump beam pulse to a first area of a surface of a sample having a plurality of film layers to generate an acoustic signal, a means for generating an x-ray probe pulse and for directing the x-ray probe pulse to a second area of the surface, a means for detecting an intensity of a diffracted x-ray probe pulse the intensity varying in response to the acoustic signal to form a probe pulse response signal, and a means for calculating an expected transient response to a theoretical acoustic signal propagated through a model of the sample and fitting the probe pulse response to the transient response to derive at least one characteristic of the sample.

Abstract translation: 一种系统，包括用于产生光泵浦波束脉冲并用于将光泵浦波束脉冲引导到具有多个膜层的样品的表面的第一区域以产生声信号的装置，用于产生X射线 探针脉冲并用于将X射线探针脉冲引导到表面的第二区域;用于检测衍射X射线探针脉冲的强度的装置，该强度响应于声信号而变化，以形成探针脉冲响应信号， 以及用于计算通过样本模型传播的理论声学信号的预期瞬态响应的装置，并将探针脉冲响应拟合到瞬态响应以导出样本的至少一个特性。