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1.发明公开MEASURING ELASTIC MODULI OF DIELECTRIC THIN FILMS USING AN OPTICAL METROLOGY SYSTEM 有权测量ELASTIZIZÄTSMODULS介质薄膜使用光学测量系统
公开(公告)号：EP1817542A4
公开(公告)日：2009-11-18
申请号：EP04794682
申请日：2004-10-07
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： LEARY SEAN P , TAS GURAY , MORATH CHRISTOPHER J , KOTELYANSKII MICHAEL , ZHENG TONG , LAZAROV GUENADIY , MILLER ANDRE D , ANTONELLI GEORGE A , LUDKE JAMIE L
IPC: G01B9/02
CPC classification number: G01N21/211 , G01N21/8422
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