公开(公告)号：SG11201507587QA

公开(公告)日：2015-10-29

申请号：SG11201507587Q

申请日：2014-02-05

Applicant: RUDOLPH TECHNOLOGIES INC ,  UNIV COLORADO REGENTS

Inventor： MURRAY TODD ,  MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MAIR ROBIN ,  MUKUNDHAN PRIYA ,  MURRAY TODD ,  MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MAIR ROBIN ,  MUKUNDHAN PRIYA

IPC: H01L21/66

公开(公告)号：SG192203A1

公开(公告)日：2013-09-30

申请号：SG2013057682

申请日：2012-01-27

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL ,  MUKUNDHAN PRIYA ,  COLGAN MICHAEL ,  ZHOU WEI

Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.

公开(公告)号：WO2008008223A3

公开(公告)日：2008-09-04

申请号：PCT/US2007015286

申请日：2007-07-09

Applicant: RUDOLPH TECHNOLOGIES INC ,  MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL J ,  HOU YANWEN ,  ONDERKO JIM ,  TAS GURAY

Inventor： MEHENDALE MANJUSHA ,  KOTELYANSKII MICHAEL J ,  HOU YANWEN ,  ONDERKO JIM ,  TAS GURAY

IPC: G01N21/00 ,  G01B11/16 ,  G01L1/24 ,  G01N21/21

CPC classification number: G01N21/211 ,  G01N21/636 ,  G01N21/8422 ,  G01N21/9501 ,  G01N21/956

Abstract: A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.

Abstract translation: 一种方法包括选择执行椭圆测量或执行光学应力产生和检测中的一个。 该方法还包括，响应于选择执行椭圆光度法，将至少一个第一控制信号施加到至少修改光束的偏振的可控延迟器，并且使用修改的光束执行椭圆光度法。 该方法还包括响应于选择执行光学应力产生和检测，将至少一个第二控制信号施加到可控制的延迟器，并且使用修改的光束执行光学应力产生和检测。 装置和计算机可读介质也被公开。