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公开(公告)号：DE69629980T2
公开(公告)日：2004-07-29
申请号：DE69629980
申请日：1996-05-29
Applicant: SAINT GOBAIN CERAMICS
Inventor： PATTEN JR , SIMPSON MATTHEW A , WINDISCHMANN HENRY , HEUSER MICHAEL S , QUIRK WILLIAM A , JAFFE STEPHEN M
Abstract: A method and corresponding apparatus for depositing a substance with temperature control on a surface of a substrate are disclosed. The method comprises the steps of : providing a cooling block having a surface that is cooled by heat exchange ; supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap ; providing a gas in said gap ; and depositing said substance on the top surface of said substrate. With such a method, the temperature conditions are uniform and repeatable when depositing a substance on a substrate. The invention is especially applicable to deposition of diamond by plasma jet.
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公开(公告)号：DE69629980D1
公开(公告)日：2003-10-23
申请号：DE69629980
申请日：1996-05-29
Applicant: SAINT GOBAIN CERAMICS
Inventor： PATTEN JR , SIMPSON MATTHEW A , WINDISCHMANN HENRY , HEUSER MICHAEL S , QUIRK WILLIAM A , JAFFE STEPHEN M
Abstract: A method and corresponding apparatus for depositing a substance with temperature control on a surface of a substrate are disclosed. The method comprises the steps of : providing a cooling block having a surface that is cooled by heat exchange ; supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap ; providing a gas in said gap ; and depositing said substance on the top surface of said substrate. With such a method, the temperature conditions are uniform and repeatable when depositing a substance on a substrate. The invention is especially applicable to deposition of diamond by plasma jet.
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