公开(公告)号：DE10136679A1

公开(公告)日：2002-02-07

申请号：DE10136679

申请日：2001-07-27

Applicant: SCHLUMBERGER TECHNOLOGIES INC ,  UNIV ROCHESTER ROCHESTER

Inventor： SOBOLEWSKI ROMAN ,  GOL TSMAN GRIGORIJ N ,  SEMENOV ALEKSEIJ D ,  OKUNEV OLEG V ,  WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

Abstract: The detection of photons consists of: (a) providing a superconductive band; (b) electrically polarizing the superconductive band; (c) directing light onto the polarized superconductive band. The polarization takes place at a level approaching the critical current of the superconductive band in order to detect a single photon that meets the superconductive band. An Independent claim is also included for a photon detector using this method of detection.

公开(公告)号：JP2002303654A

公开(公告)日：2002-10-18

申请号：JP2001390123

申请日：2001-12-21

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an IC device-testing method and an IC device-testing system for inexpensively applying a laser beam different targets of a semiconductor IC device (DUT) to be inspected simultaneously in parallel, speedily successively without requiring any rematching in a microscope. SOLUTION: The method and the system test an integrated circuit (IC) by optical coupling. The optical system includes an optical fiber, a mounting tool, and a focusing element. Also, a channel for accommodating the optical system is provided at the mounting tool where the integrated circuit is mounted. The mounting tool operates as a heat sink. At least one photosensitive element/target on the IC is inspected by light being is guided so that light is focused on each target. By the light, data are latched by an IC that is operating under the influence of a test program, test pattern output is obtained from the IC, and it is judged whether the IC is in an appropriate operation state or not according to the test pattern output.

公开(公告)号：JP2002094133A

公开(公告)日：2002-03-29

申请号：JP2001221971

申请日：2001-07-23

Applicant: SCHLUMBERGER TECHNOLOGIES INC ,  UNIV ROCHESTER

Inventor： SOBOLEWSKI ROMAN ,  GOL TSMAN GRIGORIJ N ,  SEMENOV ALEKSEIJ D ,  OKUNEV OLEG V ,  WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

Abstract: PROBLEM TO BE SOLVED: To provide a superconducting single photon detector having a high time resolution. SOLUTION: The superconducting single photon detector comprises a superconductor strip biased up to a level near its critical current value. This strip generates a recognizable output signal upon absorption of an incident single photon. In an embodiment, this strip is made of NbN. In another embodiment, the superconductor strip is formed in a twisted shape to raise the probability of catching photons from a light source. The single photon detector is suited to various application such as space communications, satellite communications, quantum communications, quantum cryptography, micro-emission, semiconductor device tests, etc.

公开(公告)号：JP2001255354A

公开(公告)日：2001-09-21

申请号：JP2001000668

申请日：2001-01-05

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： KASAPI STEVEN A ,  TSAO CHUN-CHENG ,  SOMANI SEEMA

IPC: G01R31/26 ,  G01N21/00 ,  G01N21/01 ,  G01R1/06 ,  G01R15/24 ,  G01R31/302 ,  G01R31/308 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an inspection apparatus, for a semiconductor integrated- circuit device, which reduces the influence of a noise and which uses laser optical pulses. SOLUTION: A laser is used to inspect a specimen semiconductor integrated- circuit device. A single laser optical pulse from one laser light source is split into two optical pulses, and both of the two optical pulses are made incident on the device to be inspected. The two optical pulses are separated after their interaction with the device to be inspected, and the optical pulses are detected by two photodetectors. Two outputs from the photodetectors are subtracted mutually. By their subtraction, a common-mode which is induced by the two pulses such as a noise caused by the mechanical vibration of the device to be inspected, various noises from the laser light source or the like is erased. Their difference signal is used to extract a time change signal in the device to be inspected.

公开(公告)号：FR2812455A1

公开(公告)日：2002-02-01

申请号：FR0110076

申请日：2001-07-27

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： SOBOLEWSKI ROMAN ,  GOL TSMAN GREGORY ,  SEMENOV ALEXEY D ,  OKUNEV OLEG V ,  WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

Abstract: The detection of photons consists of: (a) providing a superconductive band; (b) electrically polarizing the superconductive band; (c) directing light onto the polarized superconductive band. The polarization takes place at a level approaching the critical current of the superconductive band in order to detect a single photon that meets the superconductive band. An Independent claim is also included for a photon detector using this method of detection.

公开(公告)号：FR2812455B1

公开(公告)日：2005-03-25

申请号：FR0110076

申请日：2001-07-27

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： SOBOLEWSKI ROMAN ,  GOL TSMAN GREGORY ,  SEMENOV ALEXEY D ,  OKUNEV OLEG V ,  WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01J1/02 ,  G01J1/00 ,  G01J1/42 ,  H01L31/101 ,  H01L31/18 ,  H01L39/00 ,  H01L39/10 ,  H01L39/16 ,  H01L39/18 ,  H01L39/22

Abstract: The detection of photons consists of: (a) providing a superconductive band; (b) electrically polarizing the superconductive band; (c) directing light onto the polarized superconductive band. The polarization takes place at a level approaching the critical current of the superconductive band in order to detect a single photon that meets the superconductive band. An Independent claim is also included for a photon detector using this method of detection.

公开(公告)号：FR2803915A1

公开(公告)日：2001-07-20

申请号：FR0100299

申请日：2001-01-11

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： KASAPI STEVEN A ,  TSAO CHUN CHENG ,  SOMANI SEEMA

IPC: G01R31/26 ,  G01N21/00 ,  G01N21/01 ,  G01R1/06 ,  G01R15/24 ,  G01R31/302 ,  G01R31/308 ,  H01L21/66

Abstract: A laser beam is used to probe an integrated circuit device under test. A single laser provides a single laser pulse which is divided into two pulses, both of which are incident upon the device under test. After the two pulses interact with the device under test, the two pulses are separated and detected by two photo detectors. The electrical signals output by the photo detectors are then subtracted, which cancels out any common mode noise induced on both pulses including noise due to mechanical vibration of the device under test and also any noise from the laser. The difference signal can be used to reproduce a time varying signal in the device under test.

公开(公告)号：FR2824640A1

公开(公告)日：2002-11-15

申请号：FR0116591

申请日：2001-12-20

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01R31/307 ,  G02B6/26 ,  G02B27/00 ,  H01L31/0232

Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focusing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.

公开(公告)号：DE10162222A1

公开(公告)日：2002-07-11

申请号：DE10162222

申请日：2001-12-18

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01R31/307

Abstract: An optical system has an optical fibre (44), an alignment holder (60) and a focussing element (48). Openings/channels (62) fit in the alignment holder mounted on an integrated circuit in order to hold the optical system. The alignment holder acts as a heat sink. Light sensitive elements on the integrated circuit are triggered with light focussed on each of these elements at a target point. Independent claims are also included for: (1) a method for testing a device under test; (2) an electrical semiconductor product.

公开(公告)号：FR2824640B1

公开(公告)日：2005-01-28

申请号：FR0116591

申请日：2001-12-20

Applicant: SCHLUMBERGER TECHNOLOGIES INC

Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01R31/307 ,  G02B6/26 ,  G02B27/00 ,  H01L31/0232

Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focusing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.