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公开(公告)号：JP2002168892A
公开(公告)日：2002-06-14
申请号：JP2000366398
申请日：2000-11-30
Inventor： EHATA YUSUKE , OKUDA TORU , MORI YUZO
Abstract: PROBLEM TO BE SOLVED: To reduce the error included in directionality and degree of coupling, obtain it with complex number and clarify the phase relationship between the directionality and the degree of coupling. SOLUTION: By using an impedance terminator of (n) kinds or more (n>=3) generating a reflection wave, a progressive wave voltage Vs and a reflection wave voltage Vr and the phase relationship between output voltages vs and vr of the directional coupler and that between Vs and Vr are known. So the reflectivity Γ (=Vr/Vs) in the directional coupler and the input impedance in the directional coupler is calculated and the impedance Zp of a reaction vessel can be monitored.
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公开(公告)号：JP2002129340A
公开(公告)日：2002-05-09
申请号：JP2000327731
申请日：2000-10-26
Inventor： TAKEUCHI HIROAKI , OKUDA TORU , MORI YUZO
IPC: H05H1/46 , B01J19/08 , C23C16/44 , C23C16/458 , C23C16/50 , C23C16/54 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L31/04
Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for plasma treatment, which can plasma finish a sheet-shaped substrate of high quality in high speed and can increase a plasma width L. SOLUTION: The rotating electrode type of apparatus for plasma treatment 100 comprises a substrate holding member 3 for holding a sheet-shaped substrate 4 to make the substrate 4 approximately arc-shaped, so that the substrate 4 may face an outer circumferential face 1a of a rotating electrode 1 across the predetermined space. This arc-shaped holding for the sheet-shaped substrate 4 generates a centripetal force in the sheet-shaped substrate 4 toward a central axis direction of the rotating electrode 1, and thereby contributes to holding the sheet-shaped substrate 4 stably without causing its deformation or vibration, even when a pressure of fluid film generated between the rotating electrode 1 and the substrate 4 rises up due to high-speed rotation of the rotating electrode 1; and also contributes to generating plasma in a wider area than that in the case of holding the substrate in flat, because the space between the rotating electrode 1 and the sheet-shaped substrate 4 is kept constant in a wider area.
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公开(公告)号：JP2000312822A
公开(公告)日：2000-11-14
申请号：JP2000040364
申请日：2000-02-17
Inventor： NISHIKAWA KAZUHIRO , OKUDA TORU , MORI YUZO
IPC: H01L21/302 , B01J19/08 , H01L21/205 , H01L21/3065 , H05H1/46
Abstract: PROBLEM TO BE SOLVED: To provide a plasma treatment method which make plasma generation and retention easy in a desired region and enables plasma treatment at a high power and high electric power efficiency. SOLUTION: This plasma treatment method is to carry out plasma treatment by generating first plasma between a pair of electrodes by applying high frequency voltage to the electrodes and causing reaction of the first plasma on an object to be treated in a first region and comprises a first step (S701) of generating second plasma in a second region different from the first region and a second step (S703) of generating the first plasma in the first region. The second region is made smaller than the first region.
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公开(公告)号：JP2000068247A
公开(公告)日：2000-03-03
申请号：JP23779598
申请日：1998-08-24
Inventor： OKUDA TORU , NISHIKAWA KAZUHIRO , MORI YUZO
IPC: H01L21/302 , H01L21/3065
Abstract: PROBLEM TO BE SOLVED: To suppress a rise of a substrate temperature while ashing resist at a high speed by forming a resist layer on a surface of the substrate, then applying a high frequency voltage to mixed gas of a pressure of a specific range containing oxygen and a rare gas to generate a plasma, and removing the layer. SOLUTION: A substrate 4 in which a resist layer is formed on its surface is held on a stage 5 in a reaction container 1, then mixed gas of oxygen and rare gas is supplied from a gas supply means 2 into the container 1, and simultaneously exhausted by a gas evacuating means 3 to form an atmosphere having 0.1 to 10 atm. A high frequency voltage is applied to the mixed gas via an electrode 6a for processing a high frequency power source 7 and the stage 5 to generate a plasma. Then, the generated plasma is operated at the resist layer to remove the layer. Thus, it can be ashed to suppress a burst.
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公开(公告)号：JPH11320952A
公开(公告)日：1999-11-24
申请号：JP13633298
申请日：1998-05-19
Applicant: SHARP KK
Inventor： HIGUCHI KAORU , OKUDA TORU
Abstract: PROBLEM TO BE SOLVED: To provide an image forming apparatus capable of forming a high quality image without generating crosstalk of adjacent electrodes by providing an intermediate electrode between an image developing particle carrier body and an opposing electrode even when a plurality of control electrodes included in each are independently controlled. SOLUTION: This image forming apparatus comprises a toner carrier 19, an opposing electrode 21 wherein a plurality of control electrodes are arranged in one direction at a portion opposite the toner carrier body 19, a control grid 23 wherein a plurality of control electrode are arranged between the toner carrier body 19, opposing electrode 21 in a direction different from the arrangement of the opposing electrode 21 and gates 21 are formed on the positions each being superposed with each control electrode in the opposing direction, and an electrode voltage controlling means 36 for controlling the flying of the toner in accordance with an image forming signal. In the opposing electrode 21, at least an adjacent face and a face at a side of the control grid are covered with an insulation layer.
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Patent Agency Ranking
公开(公告)号：JPH11300975A
公开(公告)日：1999-11-02
申请号：JP11122098
申请日：1998-04-22
Applicant: SHARP KK
Inventor： OKUDA TORU , FURUKAWA KAZUHIKO
Abstract: PROBLEM TO BE SOLVED: To generate high density fine particles at low voltage while suppressing fluctuation by controlling generation of each fine particle having different particle size. SOLUTION: The liquid atomizer comprises a pointed delivery electrode 3 buried into a liquid 2, a counter electrode 5 disposed oppositely to the delivery electrode 3 on the outside of the liquid, and a control means 10 for driving the delivery electrode 3 by supplying a pulse voltage wherein the control means 10 comprises means for controlling the pulse width of the the pulse voltage.
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公开(公告)号：JPH10117304A
公开(公告)日：1998-05-06
申请号：JP26755296
申请日：1996-10-08
Applicant: SHARP KK
Inventor： HARADA TOSHIAKI , IWAKI TETSUO , OKUDA TORU
IPC: H04N5/225 , H04N5/235 , H04N5/243 , H04N5/335 , H04N5/341 , H04N5/349 , H04N5/353 , H04N5/357 , H04N5/363 , H04N5/369 , H04N5/3722 , H04N5/3728 , H04N5/378
Abstract: PROBLEM TO BE SOLVED: To prevent deterioration in image quality of a synthetic image resulting from a luminous quantity difference by eliminating the luminous quantity difference of an image-pickup light before and after an image shift. SOLUTION: An image shift means 2 shifts relatively a pickup light from an object 2-dimensionally by a prescribed amount for solid-state image-pickup elements 4a, 4b, 4c. The image-pickup elements 4a, 4b, 4c output an electric signal, based on the received pickup image light transmitted through the image shift means 2 to an A/D converter 5. An image memory 6 stores image data from the A/D converter 5. A luminous quantity correction section 7 converts a prescribed pixel value (e.g. a minimum value, a mean value, the maximum value or the like) of image data which are stored in the image memory 6 after being shifted into a prescribed pixel value of the image data before being shifted so as to correct a luminous quantity difference of the image-pickup light before and after being shifted, by making both the pixel values match each other.
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公开(公告)号：JPH1056595A
公开(公告)日：1998-02-24
申请号：JP20861396
申请日：1996-08-07
Applicant: SHARP KK
Inventor： OKADA HIDEO , IWAKI TETSUO , OKUDA TORU
Abstract: PROBLEM TO BE SOLVED: To correct a blurring amount of a device and to obtain a high resolution image. SOLUTION: An object image which is made incident through an optical system 2 is two-dimensionally shifted to a solid-state image pickup device 5 by an X axis image shift feature 3 and a Y axis image shift feature 4. A plurality of images which are shifted in this manner are synthesized by an image synthesizing circuit 6. At this point, a shift amount generator 7 generates a correction image shift amount, based on the blurring amount of a device and an image shift amount which are detected by a blurring amount detector 9. Then, the features 3 and 4 shift the object image, based on the image shift amount. Thereby, even if blurring is caused on the object image, e.g. when an image pickup device is held in hands, etc., image shift in consideration of the blurring amount is performed and a high resolution image can be acquired without being affected by such blurring.
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公开(公告)号：JPH09261545A
公开(公告)日：1997-10-03
申请号：JP6683696
申请日：1996-03-22
Applicant: SHARP KK
Inventor： NISHIKAWA MASAYUKI , OKADA HIDEO , IWAKI TETSUO , OKUDA TORU , YAMAWAKI CHIAKI
Abstract: PROBLEM TO BE SOLVED: To select a transmission-through band of a spatial filter for preventing moire depending on the resolution in the image input device provided with an image shift means to receive a plurality of images with different resolution. SOLUTION: A position of an image formed on an image pickup face of a CCD 14 is deviated by tilting a transparent refraction flat plate 22 with respect to an optical axis 10 of an incident light from a subject to attain shift of image. An image is shifted at a distance shorter than a distance between photo sensing parts of the CCD 14 and resulting plural images are synthesized to obtain an image with high resolution. A transmission-through band of the spatial filter 12 for preventing moire is selected by changing a relative angle between double refraction plates 20, 21. In the case of input of an image with high resolution by an image shift mechanism 13, the transmission-through band of the spatial filter 12 is selected toward high frequencies to obtain an image with excellent resolution.
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公开(公告)号：JPH09259415A
公开(公告)日：1997-10-03
申请号：JP6582296
申请日：1996-03-22
Applicant: SHARP KK
Inventor： ASAI SHIGEMI , OKUDA TORU
Abstract: PROBLEM TO BE SOLVED: To exclude the change with time for a long time and to maintain initial dimensional accuracy and shaping accuracy by fixing a magnetic head drum to exposed part of a metallic material inserted into a fixed drum. SOLUTION: A housing member 11 is manufactured integrally with a core member 10 inserted inside. The core member 10 and the housing member 11 are inserted into the fixed drum 9. Then, the core member 10 is arranged with projecting parts 10a at least in three places in a concentric circular pattern with a center shaft 4 as the center. The projecting parts 10a are passed through the housing member 11 to be exposed to the outside, and are fixed in the contact state with a substrate 12 of a rotary head type magnetic recording and reproducing device by screws 13.
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