公开(公告)号：DE69209698T2

公开(公告)日：1996-08-08

申请号：DE69209698

申请日：1992-02-18

Applicant: SHIMADZU CORP

Inventor： TAMURA TOMOMI ,  EDA HIDEO

IPC: A61B5/145 ,  A61B5/00 ,  A61B5/1455 ,  A61B10/00 ,  G01N21/27 ,  A61B5/02

Abstract: Disclosed herein is an optical organism measuring apparatus in which cables provided on both light transmission and receiving sides are sufficiently reduced in diameter and provided with flexibility for attaining handleability while light can be transmitted and received in high efficiency so that information can be obtained from a deep portion in an organism. Semiconductor lasers (2-1, 2-2, 2-3) are coupled with incident ends of a plurality of single core optical fibers which are contained in a flexible probe (12), so that laser light guided by the single core optical fibers is applied to an organism (8) from a forward end portion of the probe (12). A light receiving probe (18) is provided on its forward end with a silicon photodiode (14), which is attached in close contact to the organism (8) to receive light transmitted through or reflected by the organism (8). This silicon photodiode (14) is integrated with a preamplifier (16). A cable for transmitting a detection signal which is amplified by the preamplifier (16) is formed by a flexible shielding wire.

公开(公告)号：DE69209698D1

公开(公告)日：1996-05-15

申请号：DE69209698

申请日：1992-02-18

Applicant: SHIMADZU CORP

Inventor： TAMURA TOMOMI ,  EDA HIDEO

IPC: A61B5/145 ,  A61B5/00 ,  A61B5/1455 ,  A61B10/00 ,  G01N21/27 ,  A61B5/02

Abstract: Disclosed herein is an optical organism measuring apparatus in which cables provided on both light transmission and receiving sides are sufficiently reduced in diameter and provided with flexibility for attaining handleability while light can be transmitted and received in high efficiency so that information can be obtained from a deep portion in an organism. Semiconductor lasers (2-1, 2-2, 2-3) are coupled with incident ends of a plurality of single core optical fibers which are contained in a flexible probe (12), so that laser light guided by the single core optical fibers is applied to an organism (8) from a forward end portion of the probe (12). A light receiving probe (18) is provided on its forward end with a silicon photodiode (14), which is attached in close contact to the organism (8) to receive light transmitted through or reflected by the organism (8). This silicon photodiode (14) is integrated with a preamplifier (16). A cable for transmitting a detection signal which is amplified by the preamplifier (16) is formed by a flexible shielding wire.

公开(公告)号：JP2004327118A

公开(公告)日：2004-11-18

申请号：JP2003116953

申请日：2003-04-22

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TAMURA TOMOMI ,  TOMITA SADAMU ,  MITAMURA SHIGEHIRO ,  ISHIDA HIDENOBU ,  OTA MASAHIRO

IPC: H01J37/21 ,  H01J37/141

Abstract: PROBLEM TO BE SOLVED: To execute simple hysteresis correction with a small number of times when a material having large coersive force is used for a magnetic pole of an object lens.
SOLUTION: This method is used for automatically correcting hysteresis of the object lens of a scanning electron microscope by using software. In the hysteresis correction, the hysteresis correction is simply executed by a small number of times by considering frequency dependency of a hysteresis loop and by bringing the variation speed of magnetic field intensity of an excitation magnetic field close to the variation speed of an excitation current in manual operation. The method comprises: a step for increasing the excitation current supplied to the object lens to a predetermined excitation current value higher than that in normal use; and a process for decreasing it from the predetermined excitation current value to a target excitation current value. In the decreasing process, the variation speed of the excitation current is varied with multiple steps.
COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004253161A

公开(公告)日：2004-09-09

申请号：JP2003039595

申请日：2003-02-18

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TOMITA SADAMU ,  TAMURA TOMOMI ,  MITAMURA SHIGEHIRO ,  OTA MASAHIRO

IPC: H01J37/28 ,  H01J37/244

Abstract: PROBLEM TO BE SOLVED: To guide a large number of secondary electrons to an electron detection part, in a scanning electron microscope.
SOLUTION: This scanning electron microscope comprises: an object lens 1 for focusing a primary electron beam on a sample 2; the electron detection part 5 for detecting secondary electrons generated by emitting the primary electrons on the sample; and a secondary electron detector having an auxiliary electrode 8 for applying a voltage between the electron detection part and the sample; and the auxiliary electrodes 8 is disposed in parallel with an inclined surface of an outside taper part 1a of the object lens 1. The tilt angle of the auxiliary electrode 8 is set equal to or larger than the tilt angle of the taper part 1a of the object lens 1; and the distance between at least a tip part of the auxiliary electrode 8 and the taper part 1a of the object lens 1 is set below 10 mm. The tip position of the auxiliary electrode 8 is set above the bottom surface 1b of the object lens 1 by 3 mm or less.
COPYRIGHT: (C)2004,JPO&NCIPI

Abstract translation: 要解决的问题：在扫描电子显微镜中引导大量二次电子到电子检测部分。 解决方案：该扫描电子显微镜包括：用于将一次电子束聚焦在样品2上的物镜1; 用于检测通过在样品上发射一次电子产生的二次电子的电子检测部分5; 以及具有用于在电子检测部分和样品之间施加电压的辅助电极8的二次电子检测器; 并且辅助电极8与物镜1的外锥形部分1a的倾斜表面平行地设置。辅助电极8的倾斜角被设定为等于或大于其的锥形部分1a的倾斜角 物镜1; 并且辅助电极8的至少前端部分与物镜1的锥形部分1a之间的距离设定在10mm以下。 辅助电极8的尖端位置设置在物镜1的底面1b上方3mm以下。 版权所有（C）2004，JPO＆NCIPI

公开(公告)号：JPH05154136A

公开(公告)日：1993-06-22

申请号：JP34239991

申请日：1991-11-29

Applicant: SHIMADZU CORP

Inventor： TAMURA TOMOMI

IPC: A61B5/145 ,  A61B5/1459 ,  G01N21/27

Abstract: PURPOSE:To enable the correct measurement of a change in the living body itself by removing the change component by a bodily movement from measurement data when the bodily movement arises. CONSTITUTION:A change rate calculating section 52 calculates the change rate DELTAI/DELTAt per unit time with a detected light signal or the signal, such as absorbance or arithmetic value corresponding thereto, and compares the calculated change rate with a reference value R and decides whether the change rate is the bodily movement of the loving body which is a measuring object or not. An output shift section 56 returns the signal level to the level before the change so as to remove the change component from the signal and outputs the signal to a recorder 58 when the signal change is decided to be by the bodily movement. The signal is outputted to a recorder 58 without returning the signal level when the signal change is not by the bodily movement.

公开(公告)号：JP2006010335A

公开(公告)日：2006-01-12

申请号：JP2004183826

申请日：2004-06-22

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： YUASA YOSHIHITO ,  FUJITA MAKOTO ,  TAMURA TOMOMI

IPC: G21K5/02 ,  G21K1/02 ,  H01J35/16 ,  H05G1/00

Abstract: PROBLEM TO BE SOLVED: To provide an X-ray generator capable of reducing noises in X-ray and generating X-ray without limiting normal X-ray.
SOLUTION: In an X-ray tube 1 generating X-ray by collision of electronic beam B from a negative electrode 11 into a target 12, a shielding aperture 19, which has an X-ray penetrating hole 19a, adjoining the target 12 is arranged on the X-ray generating side being opposite to the negative electrode 11 side of the target 12. The X-ray penetrating hole 19a is formed so as to penetrate at least an X-ray effective radiation region T corresponding to the effective area S of an X-ray detector 2. Thereby, noises of X-ray can be reduced and X-ray can be generated without limiting normal X-ray.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种能够减少X射线噪声并产生X射线而不限制正常X射线的X射线发生器。 解决方案：在通过电子束B从负极11碰撞到靶12而产生X射线的X射线管1中，具有邻接靶的X射线穿透孔19a的屏蔽孔19 12设置在与靶12的负极11侧相对的X射线产生侧上.X射线穿透孔19a形成为至少穿透对应于有效的X射线有效辐射区域T X射线检测器2的区域S.因此，可以减少X射线的噪声，并且可以在不限制正常的X射线的情况下产生X射线。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004259469A

公开(公告)日：2004-09-16

申请号：JP2003045874

申请日：2003-02-24

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： MITAMURA SHIGEHIRO ,  OTA MASAHIRO ,  TAMURA TOMOMI ,  TOMITA SADAMU

IPC: G21K5/04 ,  H01J37/141 ,  H01J37/147 ,  H01J37/244

Abstract: PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which lowering in the sensitivity and the reduction of the scanning range caused, when a detector leaves a specimen is eliminated, and an impact on secondary electrons that are detected by a magnetic field generated by scanning coils is eliminated.
SOLUTION: The microscope includes objective lens 2 which radiate charged particles to the specimen; scintillators 11 that are at the same axis 3 of an electron optics system and arranged inside the objective lenses 2 to detect a secondary electron; a photoconductor 13 that guides light optically converted by the scintillators 11 to the outside of the objective lenses 2; and a photomultiplier tube 12, that amplifies light guided by the photoconductor 13 and obtains a signal and scanning coils 4b, that is at least a part of a scanner 4 inside the objective lenses 2 but is installed outside the photoconductor 13, wherein the distance between the detector and the specimen S is shortened by arrangement positions of the scintillators 11 and the scanning coils 4 and solve the problems of lowered sensitivity and reduced scanning range.
COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JPH04110756A

公开(公告)日：1992-04-13

申请号：JP23137690

申请日：1990-08-31

Applicant: SHIMADZU CORP

Inventor： TSUNASAWA YOSHIO ,  TAMURA TOMOMI ,  EDA HIDEO

IPC: G01N33/72 ,  G01N21/59

Abstract: PURPOSE:To provide measurability for the absolute value of photo-absorptivity by performing auto zero processing of the photo-absorptivity including the auto gain setting to the standard of known photo-absorptivity in which the absorptivity is not zero, and using the absorptivity point-of-origin standard independent of patient. CONSTITUTION:Auto zero processing of photo-absorptivity including auto gain setting is conducted to the standard of known photo-absorptivity where the absorptivity is not zero, and thereupon the initial photo-absorptivity value of a vital body specimen is measured. Then a similar auto zero processing is made again, and change in the photo-absorptivity thereafter is measured. In the standard 1 of known photo- absorptivity where the absorptivity is not zero, a light sending part 4a of a absorption side light guide 4 is installed at an opening of a light input part 2, and there the light is projected over. This projected light 6 diffuses at the inner surface of the light input part 2. The photo-receiving part 10a of a reception side light guide 10 is installed at the outlet opening of the light output part 8, and the diffused light 12 by the output part 8 is put incident to this light guide 10. A junction 14 is provided between these light input and output parts 2, 8, and setting is made so that an appropriate reduction of light intensity is obtained.

公开(公告)号：JP2006019205A

公开(公告)日：2006-01-19

申请号：JP2004197796

申请日：2004-07-05

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TAMURA TOMOMI ,  FUJITA MAKOTO ,  MAEDA HIROKI

IPC: H05G1/00 ,  G21K5/00 ,  G21K5/02 ,  H01J35/06 ,  H01J35/14 ,  H05G1/52

Abstract: PROBLEM TO BE SOLVED: To provide an X-ray generator capable of accurately controlling X-ray.
SOLUTION: The X-ray generator is provided with a table. This table prestores the correlation between a lighting time which is a physical quantity relevant to a lighting condition and the amount of electron beams (emission current). An optimal emission current of this emission current is a value which optimizes electron beam characteristics, for example, a condition in which the diameter of a virtual light source becomes minimum. The optimal emission current I becomes lower as the lighting time becomes longer. The amount of the electron beams according to the lighting time at present is set by reading the correlation from the table. Accordingly, the amount of electron beams can always be accurately and optimally set regardless of the situation of lighting conditions, and an X-ray can be controlled accurately.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供能够精确地控制X射线的X射线发生器。

解决方案：X射线发生器配有一张桌子。 该表预先记录与照明条件相关的物理量的照明时间与电子束的量（发射电流）之间的相关性。 该发射电流的最佳发射电流是优化电子束特性的值，例如虚拟光源的直径变为最小的条件。 随着照明时间变长，最佳发射电流I变低。 目前根据照明时间的电子束的量通过从表中读取相关性来设定。 因此，无论照明条件如何，电子束的总量都可以始终准确和最佳地设定，并且可以准确地控制X射线。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004319378A

公开(公告)日：2004-11-11

申请号：JP2003114478

申请日：2003-04-18

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TOMITA SADAMU ,  TAMURA TOMOMI ,  MITAMURA SHIGEHIRO ,  OTA MASAHIRO ,  OSANAI KATSUTOYO

IPC: H01J37/141

Abstract: PROBLEM TO BE SOLVED: To solve the problem that the magnetic intensity by hysteresis characteristic of a magnetic lens cannot be determined uniquely.
SOLUTION: The magnetic lens 5 is a magnetic lens for focusing an electron beam or ion beam, which comprises a magnetic sensor 11 at the sample-side tip of a magnetic yoke 5b constituting the magnetic lens at least outside the axis 6 of an electronic optical system relative to the magnetic yoke 5b on the axis 6 side of the electronic optical system. The magnitude of the current supplied to a magnetic coil 5a is controlled by use of the output of the magnetic sensor, whereby the magnetic intensity is controlled to a predetermined value. According to this, the magnetism generated by the magnetic lens is controlled to a predetermined intensity to control the magnetic intensity to the predetermined value, whereby the focal distance is uniquely determined, and the distance on an observation sample is uniquely determined.
COPYRIGHT: (C)2005,JPO&NCIPI