-
1.
公开(公告)号:EP2387458A4
公开(公告)日:2012-04-11
申请号:EP10732153
申请日:2010-01-15
Applicant: SOLEXEL INC
Inventor: CRAFTS DOUG , MOSLEHI MEHRDAD , TAMILMANI SUBRAMANIAN , KRAMER JOE , KAMIAN GEORGE , NAG SOMNATH
CPC classification number: C25F3/12 , C25D11/32 , C25F7/00 , H01L21/67005 , H01L21/67075 , H01L21/67086 , H01L21/6776 , H01L31/1804 , Y02E10/547 , Y02P70/521