公开(公告)号：AU2012358174A1

公开(公告)日：2014-08-14

申请号：AU2012358174

申请日：2012-12-23

Applicant: SOLEXEL INC

Inventor： KRAMER KARL-JOSEF ,  ASHJAEE JAY ,  MOSLEHI MEHRDAD M ,  CALCATERRA ANTHONY ,  DUTTON DAVID ,  KAPUR PAWAN ,  SEUTTER SEAN ,  FATEMI HOMI

IPC: H01L21/205 ,  H01L31/04

Abstract: Processing equipment for the metallization of a plurality of workpieces are provided. The equipment comprising a controlled atmospheric region isolated from external oxidizing ambient with at least one deposition zone for the application of a metal layer on a workpiece. A transport system moves the workpiece positioned in a batch carrier plate through the controlled atmospheric region.

公开(公告)号：AU2015210451A1

公开(公告)日：2015-09-03

申请号：AU2015210451

申请日：2015-08-07

Applicant: SOLEXEL INC

Inventor： KRAMER KARL-JOSEF ,  ASHJAEE JAY ,  MOSLEHI MEHRDAD M ,  CALCATERRA ANTHONY ,  DUTTON DAVID ,  KAPUR PAWAN ,  SEUTTER SEAN ,  FATEMI HOMI

IPC: H01L21/205 ,  H01L31/04

Abstract: Processing equipment for the metallization of a plurality of workpieces are provided. The equipment comprising a controlled atmospheric region isolated from external oxidizing ambient with at least one deposition zone for the application of a metal layer on a workpiece. A transport 5 system moves the workpiece positioned in a batch carrier plat through the controlled atmospheric region.

公开(公告)号：AU2015210451B2

公开(公告)日：2017-08-10

申请号：AU2015210451

申请日：2015-08-07

Applicant: SOLEXEL INC

Inventor： KRAMER KARL-JOSEF ,  ASHJAEE JAY ,  MOSLEHI MEHRDAD M ,  CALCATERRA ANTHONY ,  DUTTON DAVID ,  KAPUR PAWAN ,  SEUTTER SEAN ,  FATEMI HOMI

IPC: H01L21/205 ,  H01L31/04

Abstract: Processing equipment for the metallization of a plurality of workpieces are provided. The equipment comprising a controlled atmospheric region isolated from external oxidizing ambient with at least one deposition zone for the application of a metal layer on a workpiece. A transport 5 system moves the workpiece positioned in a batch carrier plat through the controlled atmospheric region.