Abstract:
When an irregular pattern is formed by dry etching depending on the shape of a mask formed on a substrate, the mask is controlled to retract as etching progresses such that the side wall of the pattern has an inclining face. For that purpose, the mask is formed of a resin material, for example, and dry etching is performed using an etching gas containing oxygen. A magnetic neutral line discharge plasma etching system is preferably employed.
Abstract:
A memory device is provided in which recording of multi-valued data can be performed at a high speed and the recording of multi-valued data can be performed with a drive circuit having comparatively simple configuration. The memory device is formed of a memory cell including a memory element which stores information according to a state of electric resistance and a MIS transistor as a load connected in series to the memory element. When an operation to change the memory cell from a state of high resistance value to a state of low resistance value is defined as writing and when an operation to change the memory cell from the state of low resistance value to the state of high resistance value is defined as erasing respectively, a resistance value of the memory element after writing is set to a plurality of different levels by controlling gate voltages VG1, VG2 and VG3, which are applied to the MIS transistor at the time of writing, so that different information is respectively assigned to each of the plurality of levels and to the state of high resistance value after erasing to store information of three values or more respectively into a memory element of each memory cell.
Abstract:
The device has a recording method to detect a content of information already recorded on a memory unit. The information already recorded on the memory unit is compared with information to be recorded on the memory unit. A voltage is applied to the unit to make an ordinary information recording process if both the information are different. The recording process is disabled when the information are identical.
Abstract:
A memory cell has a structure, in which an inter-electrode material layer is sandwiched between a first electrode and a second electrode. Data is stored by a change in a resistance value between the first electrode and the second electrode. The resistance value when a memory element is in a high resistance state is expressed as R_mem_high; the resistance value when the memory element is in a low resistance state is expressed as R_mem_low1; the resistance value of a load circuit is expressed as R_load; the reading voltage is expressed as Vread by setting the voltage of a second power supply line to the reference voltage; and the threshold voltage is expressed as Vth_critical. In writing data into the memory cell, the low resistance state is created so that these parameters satisfy specific relations. The load circuit is formed by an element having the same structure as of the memory element of the memory cell. The memory cell is therefore arranged such that data reading can be more easily and more precisely performed by setting specific conditions for writing into the memory cell.
Abstract:
A first optical device (1100) according to the present invention comprises a base (1101) made of a first optical material and a second optical material (1102) having a refractive index different from that of the first optical material, and the base has a concavity (1101B), and the second optical material (1102) is filled in this concavity. A second optical device (1110) according to the present invention comprises a base (1111) made of a first optical material and a second optical material having a refractive index different from the first optical material, and the base (1111) comprises first and second faces facing each other, a first concavity (1101B) is formed in the first face (1110U) and a second concavity (1111B) is formed in the second face (1110B), and the second optical material is filled in the first (1101B) and second (1111B) concavities.
Abstract:
A method for manufacturing an optical disc master using an existing exposure system, and a method for manufacturing an optical disc having higher recording capacity. The method for manufacturing an optical disc, using a master to produce the optical disc having an irregular pattern thereon, the master being produced by the steps of forming a resist layer composed of a resist material including an incomplete oxide of a transition metal such as W or Mo on a substrate, the oxygen content of the incomplete oxide being smaller than the oxygen content of the stoichiometric composition corresponding to a valence of the transition metal; selectively exposing the resist layer with laser according to a recording signal pattern; and developing the resist layer to form the predetermined irregular pattern.
Abstract:
The device has a recording method to detect a content of information already recorded on a memory unit. The information already recorded on the memory unit is compared with information to be recorded on the memory unit. A voltage is applied to the unit to make an ordinary information recording process if both the information are different. The recording process is disabled when the information are identical.
Abstract:
The method of the present invention includes an exposing step in which a laser beam for recording modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on the optical disc is applied to an inorganic resist layer 101 formed on a substrate 100 to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and a development step in which a concave and convex pattern corresponding to the information concave and convex pattern by the inorganic resist layer is formed. By applying a laser beam for estimation to a predetermined area on the inorganic resist layer in the exposing step to estimate recorded signal characteristics of the exposed pattern by the inorganic resist layer using reflected light of the laser beam for estimation, and controlling power of the laser beam for recording based on the estimated result, the aimed information recording on the optical disc can reliably be obtained.