公开(公告)号：DE60322097D1

公开(公告)日：2008-08-21

申请号：DE60322097

申请日：2003-11-25

Applicant: SONY CORP

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  MITARAI SHUN ,  ITO YASUYUKI

IPC: B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/24

Abstract: Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

公开(公告)号：EP1770859A4

公开(公告)日：2012-12-19

申请号：EP05748142

申请日：2005-06-07

Applicant: SONY CORP

Inventor： TANAKA MASAHIRO ,  MITARAI SHUN ,  TADA MASAHIRO ,  NANIWADA KOJI

IPC: H03H9/24 ,  B81B3/00 ,  H01H59/00 ,  H01L21/822 ,  H01L27/04 ,  H03H3/007 ,  H03H9/46 ,  H03H9/50 ,  H03H9/52

CPC classification number: H03H9/2463 ,  H03H3/0073 ,  H03H3/0075 ,  H03H9/2426 ,  H03H9/505 ,  H03H9/525

公开(公告)号：EP1568655A4

公开(公告)日：2006-12-06

申请号：EP03774185

申请日：2003-11-25

Applicant: SONY CORP

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  MITARAI SHUN ,  ITO YASUYUKI

IPC: B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

Abstract: A micromachine for a high frequency filter having a high Q factor and a frequency band which is high. A micromachine (1) comprising an output electrode (7) disposed on a board(5), an interlayer insulation film (9) covering the board (5) and having a hole pattern (9a) with an output electrode (7) used as a bottom, and a band-like vibrator electrode (11) disposed on the interlayer insulation film (9) in such a manner that, with the interior of the hole pattern (9a) used as a space (A), it crosses the upper region thereof, the micromachine being characterized in that the vibrator electrode (11) is formed as a recess on the hole pattern (9a) side along the side wall of hole pattern (9a).