公开(公告)号：EP2333807A2

公开(公告)日：2011-06-15

申请号：EP10275127.8

申请日：2010-12-14

Applicant: SPP Process Technology Systems UK Limited

Inventor： Macneil, John ,  Bennet, Paul George

IPC: H01J27/02

CPC classification number: H01J27/022 ,  H01J37/24 ,  H01J2237/0206 ,  H01J2237/08 ,  H01J2237/3146

Abstract: This invention relates an ion beam source (10) for use with a non-electrical conducting target (14) including a grid (13) for extracting ions and a power supply for supplying pulsed power to the grid (13) to extract the ions.

Abstract translation: 本发明涉及一种用于非导电靶（14）的离子束源（10），其包括用于提取离子的栅极（13）和用于向栅极（13）提供脉冲功率以提取离子的电源。

公开(公告)号：EP2333807A3

公开(公告)日：2015-11-18

申请号：EP10275127.8

申请日：2010-12-14

Applicant: SPP Process Technology Systems UK Limited

Inventor： Macneil, John ,  Bennet, Paul George

IPC: H01J27/02 ,  H01J37/24

CPC classification number: H01J27/022 ,  H01J37/24 ,  H01J2237/0206 ,  H01J2237/08 ,  H01J2237/3146

Abstract: This invention relates an ion beam source (10) for use with a non-electrical conducting target (14) including a grid (13) for extracting ions and a power supply for supplying pulsed power to the grid (13) to extract the ions.

Abstract translation: 本发明涉及一种用于包括用于提取离子的栅格（13）和用于向栅格（13）提供脉冲功率以提取离子的电源的非导电目标（14）的离子束源（10）。