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    Production of field effect transistors with reduced short channel effects and offering an elevated degree of integration for Silicon On Insulator integrated circuits
    2.
    发明专利
    Production of field effect transistors with reduced short channel effects and offering an elevated degree of integration for Silicon On Insulator integrated circuits 未知

    公开(公告)号：FR2865850A1

    公开(公告)日：2005-08-05

    申请号：FR0401018

    申请日：2004-02-03

    Applicant: ST MICROELECTRONICS SA

    Inventor： SKOTNICKI THOMAS ,  CHANEMOUGAME DANIEL ,  MONFRAY STEPHANE

    IPC: H01L21/336 ,  H01L29/786 ,  H01L29/423

    Abstract: The production of a field effect transistor comprises: (A) obtaining a conductor substrate (100) supporting a portion of semiconductor material above a surface (S), with a portion of temporary material between it and the substrate; (B) forming a gate (2) comprising an upper part (C) in rigid liaison with the semiconductor material and a support part (A) resting on the substrate, the gate being obtained such that it is electrically insulated with respect to the semiconductor material and the conductor substrate; (C) removing the temporary material, the gate assuring the retention of the semiconductor material portion with respect to the substrate, in a manner to create an empty space between the semiconductor material portion and the substrate in place of the temporary material; (D) filling, at least partially, the empty space with an insulating material. Independent claims are also included for: (A) a field effect transistor produced by the method; (B) an integrated circuit incorporating this field effect transistor.

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