公开(公告)号：FR2844096A1

公开(公告)日：2004-03-05

申请号：FR0210779

申请日：2002-08-30

Applicant: ST MICROELECTRONICS SA ,  KONINKL PHILIPS ELECTRONICS NV

Inventor： KORDIC SRDJAN ,  INARD ALAIN ,  ROUSSEL CELINE ,  GAYET PHILIPPE

IPC: H01L21/02 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/768 ,  H01L23/522 ,  H01L27/08 ,  H01L21/302

Abstract: Fabrication of integrated circuit comprises formation and withdrawal of conducting inserts. Some components (10, 20) of electric circuit are incorporated in some insulating materials (2, 4) superposed above substrate (1). Exclusion volume is arranged around certain components (10) sensitive to electrostatic coupling whilst conferring flat surface (S2) to each material (2, 4) at end of polishing.

公开(公告)号：JP2004165672A

公开(公告)日：2004-06-10

申请号：JP2003385102

申请日：2003-11-14

Applicant: Koninkl Philips Electronics Nv ,  Stmicroelectronics Sa ,  エステーミクロエレクトロニクス ソシエテ アノニム ,  コニンクリユケ フィリプス エレクトロニクス ナムローゼ フェンノートシャップKoninklijke Philips Electronics N.V.

Inventor： KORDIC SRDJAN ,  ROUSSEL CELINE ,  INARD ALAIN

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/528

CPC classification number: H01L21/768 ,  H01L21/76838 ,  H01L23/5226 ,  H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To decrease possibility that voids are formed in an interface between a connector and an electric line. SOLUTION: Apparatus that electrically connects two conduction lines 1, 2 in an integrated circuit has a first conductive connector 3a between the two lines. The apparatus further has additional interfaces 3b to 3g or 6a to 6f for one of two lines, the faces being different from interfaces between the first connector and the lines, parallel to the direction along which electric current for the line flows, and different from a lateral interface between an insulating material and the line. The additional interfaces are disposed at a position in a substantially smaller distance than width of the line from the first connector 3a. The additional interfaces are obtained by disposing second electrically-conductive connectors 3b to 3g between the two lines 1, 2, or disposing ribs 6a to 6f on the line, or disposing cut on at least one of the faces of the line. COPYRIGHT: (C)2004,JPO