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公开(公告)号:DE60306892D1
公开(公告)日:2006-08-31
申请号:DE60306892
申请日:2003-05-02
Applicant: ST MICROELECTRONICS SRL
Inventor: BORTESI LUCA , VENDRAME LORIS , BOGLIOLO ALESSANDRO
Abstract: A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines. Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.
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公开(公告)号:DE60306892T2
公开(公告)日:2007-08-30
申请号:DE60306892
申请日:2003-05-02
Applicant: ST MICROELECTRONICS SRL
Inventor: BORTESI LUCA , VENDRAME LORIS , BOGLIOLO ALESSANDRO
Abstract: A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines. Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.
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