1.
    发明专利
    未知

    公开(公告)号:DE60306892D1

    公开(公告)日:2006-08-31

    申请号:DE60306892

    申请日:2003-05-02

    Abstract: A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines. Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.

    2.
    发明专利
    未知

    公开(公告)号:DE60306892T2

    公开(公告)日:2007-08-30

    申请号:DE60306892

    申请日:2003-05-02

    Abstract: A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines. Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.

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