公开(公告)号：IT1313154B1

公开(公告)日：2002-06-17

申请号：ITMI991768

申请日：1999-08-05

Applicant: ST MICROELECTRONICS SRL

Inventor： ROMEO CARMELO ,  CANESTRARI PAOLO ,  FIORINO ANTONIO

IPC: G03F20060101 ,  G03F1/32 ,  G03F7/20 ,  G03F9/00

Abstract: A partially transparent layer made of phase shift material having octagonal window (17), is placed over the quartz plate of the attenuated phase shifting mask (Att.PSM). Independent claims are also included for the following: (1) method of defining contacts on integrated circuit device using electromagnetic wave; and (2) integrated circuit contact.

公开(公告)号：ITMI991768A1

公开(公告)日：2001-02-05

申请号：ITMI991768

申请日：1999-08-05

Applicant: ST MICROELECTRONICS SRL

Inventor： ROMEO CARMELO ,  CANESTRARI PAOLO ,  FIORINO ANTONIO

IPC: G03F20060101 ,  G03F1/32 ,  G03F7/20 ,  G03F9/00

Abstract: A partially transparent layer made of phase shift material having octagonal window (17), is placed over the quartz plate of the attenuated phase shifting mask (Att.PSM). Independent claims are also included for the following: (1) method of defining contacts on integrated circuit device using electromagnetic wave; and (2) integrated circuit contact.

公开(公告)号：ITMI991768D0

公开(公告)日：1999-08-05

申请号：ITMI991768

申请日：1999-08-05

Applicant: ST MICROELECTRONICS SRL

Inventor： ROMEO CARMELO ,  CANESTRARI PAOLO ,  FIORINO ANTONIO

IPC: G03F20060101 ,  G03F1/32 ,  G03F7/20 ,  G03F9/00

Abstract: A partially transparent layer made of phase shift material having octagonal window (17), is placed over the quartz plate of the attenuated phase shifting mask (Att.PSM). Independent claims are also included for the following: (1) method of defining contacts on integrated circuit device using electromagnetic wave; and (2) integrated circuit contact.