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1.发明专利
公开(公告)号：DE69841732D1
公开(公告)日：2010-08-05
申请号：DE69841732
申请日：1998-04-20
Applicant: ST MICROELECTRONICS SRL
Inventor： MORONI MAURIZIO , CLEMENTI CESARE
IPC: H01L21/285 , H01L21/336 , H01L21/60 , H01L21/8238
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