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公开(公告)号：DE69630204D1
公开(公告)日：2003-11-06
申请号：DE69630204
申请日：1996-05-14
Applicant: ST MICROELECTRONICS SRL
Inventor： PALMIERI MICHELE , GALBIATI PAOLA , VECCHI LODOVICA
IPC: H01L21/74 , H01L21/8249
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